Zvichienzaniswa nedzimwe nzira dzekuputira, magnetron sputtering coating inoratidzwa nezvinhu zvinotevera: ma parameter ekushanda ane dynamic adjustment range yakakura yekumhanya kwe coating deposition uye ukobvu (mamiriro enzvimbo yakaputirwa) inogona kudzorwa zviri nyore, uye hapana muganho wekugadzira pa geometry ye magnetron target kuti ive nechokwadi chekuti coating yakafanana; hapana dambudziko remadonhwe emvura mu firimu layer; dzinenge simbi dzese, alloys, uye ceramics zvinogona kugadzirwa kuita zvinhu zvinotarwa; uye zvinhu zvinotarwa zvinogona kugadzirwa neDC kana RF magnetron sputtering, iyo inogona kugadzira pure metal kana alloy coatings ine precision ratio, pamwe ne metal reactive films ine gas participation. Kuburikidza neDC kana RF sputtering, zvinokwanisika kugadzira pure metal kana alloy coatings ine precision uye constant ratios, pamwe ne metal reactive films ine gas participation, kuti isangane nezvinodiwa zvekusiyana kwefirimu rakatetepa uye high precision. Zvakajairika process parameters ye magnetron sputtering coating ndeiyi: working pressure ye 0.1Pa; target voltage ye 300~700V; target power density ye 1~36W/cm².
Zvinhu chaizvo zvemagnetron sputtering ndeizvi:
(1) Kuwanda kwehuwandu hwema "deposition rate". Nekuda kwekushandiswa kwema "magnetron electrodes", huwandu hwakawanda hwe "target bombardment ion current" hunogona kuwanikwa, saka huwandu hwe "sputter etching" pamusoro pe "target" uye huwandu hwe "film deposition" pamusoro pe "substrate" hwakakwira zvikuru.
(2) Kushanda nesimba kwakanyanya. Mikana yekuroverana kwemaerekitironi ane simba shoma nemaatomu egasi yakakwira, saka mwero wekupatsanurwa kwegasi unowedzera zvakanyanya. Saka, kuvharirwa kwegasi rinobuda (kana plasma) kunodzikira zvikuru. Saka, DC magnetron sputtering kana ichienzaniswa neDC dipole sputtering, kunyangwe kana simba rekushanda rikaderedzwa kubva pa1~10Pa kusvika pa10-210-1Pa sputtering voltage yakaderedzwawo kubva pazviuru zvevolts kusvika kumazana evolts, kushanda zvakanaka kwesputtering uye mwero wekuisa simba unowedzerwa nehukuru hwemaodha.
–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua
Nguva yekutumira: Zvita-01-2023