Compared with other coating technologies, magnetron sputtering coating is characterized by the following features: the working parameters have a large dynamic adjustment range of coating deposition speed and thickness (the state of the coated area) can be easily controlled, and there is no design limitation on the geometry of the magnetron target to ensure the uniformity of the coating; there is no problem of droplet particles in the film layer; almost all metals, alloys, and ceramics can be made into target materials; and the target material can be produced by DC or RF magnetron sputtering, which can generate pure metal or alloy coatings with precise ratio, as well as metal reactive films with gas participation. Through DC or RF sputtering, it is possible to generate pure metal or alloy coatings with precise and constant ratios, as well as metal reactive films with gas participation, to meet the requirements of thin film diversity and high precision. Typical process parameters for magnetron sputtering coating are: working pressure of 0.1Pa; target voltage of 300~700V; target power density of 1~36W/cm².
The specific features of magnetron sputtering are:
(1) High deposition rate. Due to the use of magnetron electrodes, a very large target bombardment ion current can be obtained, so the sputter etching rate on the target surface and the film deposition rate on the substrate surface are both very high.
(2) High power efficiency. The collision probability of low-energy electrons and gas atoms is high, so the gas dissociation rate is greatly increased. Accordingly, the impedance of the discharge gas (or plasma) is greatly reduced. Therefore, DC magnetron sputtering compared with DC dipole sputtering, even if the working pressure is reduced from 1~10Pa to 10-210-1Pa sputtering voltage is also reduced from thousands of volts to hundreds of volts, sputtering efficiency and deposition rate is increased by orders of magnitude.
–This article is released by vacuum coating machine manufacturer Guangdong Zhenhua
Post time: Dec-01-2023