Xa kuthelekiswa nezinye iiteknoloji zokugquma, ukugquma nge-magnetron sputtering kubonakaliswa zezi mpawu zilandelayo: iiparameter zokusebenza zinoluhlu olukhulu lohlengahlengiso oluguquguqukayo lwesantya sokufakwa kwe-coating kwaye ubukhulu (imeko yendawo egqumayo) inokulawulwa ngokulula, kwaye akukho mda woyilo kwi-geometry yethagethi ye-magnetron ukuqinisekisa ukufana kwe-coating; akukho ngxaki yamasuntswana amathontsi kumaleko wefilimu; phantse zonke iintsimbi, ii-alloys, kunye neeseramikhi zinokwenziwa zibe zizinto ezijoliswe kuzo; kwaye izinto ezijoliswe kuzo zinokuveliswa yi-DC okanye i-RF magnetron sputtering, enokuvelisa i-metal ecocekileyo okanye i-alloy coating enomlinganiselo ochanekileyo, kunye neefilimu ezisabelayo zesinyithi ezinokuthatha inxaxheba kwegesi. Ngokugquma nge-DC okanye i-RF, kunokwenzeka ukuvelisa i-metal ecocekileyo okanye i-alloy coating enomlinganiselo ochanekileyo nongaguqukiyo, kunye neefilimu ezisabelayo zesinyithi ezinokuthatha inxaxheba kwegesi, ukuhlangabezana neemfuno zokwahluka kwefilimu encinci kunye nokuchaneka okuphezulu. Iiparameter zenkqubo eziqhelekileyo zokugquma nge-magnetron sputtering zezi: uxinzelelo olusebenzayo lwe-0.1Pa; i-voltage ekujoliswe kuyo ye-300~700V; uxinano lwamandla ekujoliswe kuwo lwe-1~36W/cm².
Iimpawu ezithile ze-magnetron sputtering zezi:
(1) Izinga eliphezulu lokufaka. Ngenxa yokusetyenziswa kwee-electrodes ze-magnetron, umsinga omkhulu kakhulu we-ion bombardment current unokufunyanwa, ngoko ke izinga lokutshiza i-sputter kumphezulu ojoliswe kuwo kunye nezinga lokufaka ifilimu kumphezulu we-substrate zombini ziphezulu kakhulu.
(2) Ukusebenza kakuhle kwamandla aphezulu. Amathuba okungqubana kwee-electron ezisebenzisa amandla aphantsi kunye neeathom zegesi aphezulu, ngoko ke izinga lokuqhekeka kwegesi liyanda kakhulu. Ngokufanelekileyo, ukuthintelwa kwegesi ekhutshwayo (okanye iplasma) kuyancipha kakhulu. Ke ngoko, ukutshiza kwe-DC magnetron xa kuthelekiswa nokutshiza kwe-DC dipole, nokuba uxinzelelo olusebenzayo luncitshisiwe ukusuka kwi-1 ~ 10Pa ukuya kwi-10-210-1Pa i-voltage yokutshiza nayo incitshisiwe ukusuka kumawaka ee-volts ukuya kumakhulu ee-volts, ukusebenza kakuhle kokutshiza kunye nezinga lokufakwa kwegesi kuyanda ngemiyalelo yobukhulu.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Disemba-01-2023