Ki te whakatauritea ki ētahi atu hangarau paninga, ko ngā āhuatanga o te paninga magnetron sputtering he nui: he whānui te whānuitanga whakarerekētanga hihiri o te tere whakatakotoranga paninga me te matotoru (te āhua o te rohe paninga) ka taea te whakahaere ngāwari, ā, kāore he herenga hoahoa i runga i te āhua o te ūnga magnetron hei whakarite i te ōritetanga o te paninga; kāore he raruraru o ngā matūriki maturuturu i roto i te paparanga kiriata; tata ki ngā konganuku katoa, ngā koranu, me ngā uku ka taea te hanga hei rauemi ūnga; ā, ka taea te whakaputa i te rauemi ūnga mā te DC, RF rānei magnetron sputtering, ka taea te whakaputa i ngā paninga konganuku parakore, koranu rānei me te ōwehenga tika, me ngā kiriata tauhohe konganuku me te whai wāhi hau. Mā te DC, RF rānei sputtering, ka taea te whakaputa i ngā paninga konganuku parakore, koranu rānei me ngā ōwehenga tika me te pumau, me ngā kiriata tauhohe konganuku me te whai wāhi hau, hei whakatutuki i ngā whakaritenga o te kanorau kiriata angiangi me te tino tika. Ko ngā tawhā tukanga noa mō te paninga magnetron sputtering ko: te pēhanga mahi o te 0.1Pa; te ngaohiko ūnga o te 300~700V; te mātotoru mana ūnga o te 1~36W/cm².
Ko ngā āhuatanga motuhake o te magnetron sputtering ko:
(1) Te tere whakatakotoranga teitei. Nā te whakamahinga o ngā irahiko magnetron, ka taea te whiwhi i tētahi iahiko katote pupuhi nui rawa atu, nō reira he tino teitei te tere whakairo i runga i te mata o te mata me te tere whakatakotoranga kiriata i runga i te mata o te papa.
(2) Te kaha o te mana. He nui te tūponotanga o te tukinga o ngā irahiko iti-pūngao me ngā ngota hau, nō reira ka tino piki ake te tere wehenga o te hau. Nō reira, ka tino heke te aukati o te hau tuku (te plasma rānei). Nō reira, ahakoa ka whakaitihia te pēhanga mahi mai i te 1~10Pa ki te 10-210-1Pa, ka whakaitihia hoki te ngaohiko pēhanga mai i ngā mano volts ki ngā rau volts, ka piki ake te pai o te pēhanga me te tere whakatakotoranga mā te nui o te kaha.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: Hakihea-01-2023