Halaye na murfin magnetron sputtering Babi na 1

Idan aka kwatanta da sauran fasahar shafa, ana iya sarrafa murfin magnetron ta hanyar waɗannan fasaloli: sigogin aiki suna da babban kewayon daidaitawa mai ƙarfi na saurin adana shafi da kauri (yanayin yankin da aka shafa) ana iya sarrafa shi cikin sauƙi, kuma babu iyakancewar ƙira akan yanayin maƙasudin magnetron don tabbatar da daidaiton murfin; babu matsala na barbashi masu ɗigo a cikin layin fim; kusan dukkan ƙarfe, gami, da yumbu ana iya yin su kayan da aka nufa; kuma ana iya samar da kayan da aka nufa ta hanyar sputtering na DC ko RF magnetron, wanda zai iya samar da rufin ƙarfe ko ƙarfe mai tsabta tare da daidaiton rabo, da kuma fina-finan amsawa na ƙarfe tare da haɗin gas. Ta hanyar sputtering na DC ko RF, yana yiwuwa a samar da rufin ƙarfe ko ƙarfe mai tsabta tare da daidaiton rabo, da kuma fina-finan amsawa na ƙarfe tare da haɗin gas, don biyan buƙatun bambancin fim mai siriri da babban daidaito. Sigogi na tsari na yau da kullun don murfin sputtering na magnetron sune: matsin lamba na aiki na 0.1Pa; ƙarfin lantarki na manufa na 300~700V; yawan ƙarfin manufa na 1~36W/cm².

Babban fasalin magnetron sputtering shine:

(1) Yawan ajiyar bayanai mai yawa. Saboda amfani da na'urorin lantarki na magnetron, ana iya samun babban ƙarfin ion mai fashewa mai ƙarfi, don haka ƙimar cirewar sputter akan saman da aka nufa da kuma ƙimar ajiye fim akan saman substrate duka suna da yawa sosai.

(2) Ingantaccen ƙarfin lantarki. Yiwuwar karo tsakanin electrons masu ƙarancin kuzari da atom ɗin iskar gas yana da yawa, don haka ƙimar rabuwar iskar gas tana ƙaruwa sosai. Saboda haka, juriyar iskar gas mai fitarwa (ko plasma) tana raguwa sosai. Saboda haka, sputtering na DC magnetron idan aka kwatanta da sputtering na DC dipole, koda kuwa an rage matsin lamba na aiki daga 1~10Pa zuwa 10-210-1Pa ƙarfin lantarki na sputtering shima yana raguwa daga dubban volts zuwa ɗaruruwan volts, ingancin sputtering da ƙimar ajiya yana ƙaruwa ta hanyar umarni na girma.

– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua