Cov yam ntxwv ntawm magnetron sputtering txheej Tshooj 1

Piv nrog rau lwm cov txheej txheem txheej, magnetron sputtering txheej yog tus cwj pwm los ntawm cov yam ntxwv hauv qab no: cov kev ua haujlwm muaj ntau qhov kev hloov kho dynamic ntawm kev tso txheej ceev thiab tuab (lub xeev ntawm thaj chaw coated) tuaj yeem tswj tau yooj yim, thiab tsis muaj kev txwv tsim ntawm geometry ntawm lub hom phiaj magnetron kom ntseeg tau tias qhov sib xws ntawm cov txheej; tsis muaj teeb meem ntawm cov khoom me me hauv cov txheej zaj duab xis; yuav luag txhua yam hlau, alloys, thiab ceramics tuaj yeem ua rau cov khoom siv hom phiaj; thiab cov khoom siv hom phiaj tuaj yeem tsim los ntawm DC lossis RF magnetron sputtering, uas tuaj yeem tsim cov hlau ntshiab lossis alloy txheej nrog qhov sib piv meej, nrog rau cov yeeb yaj kiab hlau reactive nrog kev koom tes roj. Los ntawm DC lossis RF sputtering, nws muaj peev xwm tsim cov hlau ntshiab lossis alloy txheej nrog qhov sib piv meej thiab tas li, nrog rau cov yeeb yaj kiab hlau reactive nrog kev koom tes roj, kom ua tau raws li qhov yuav tsum tau ua ntawm cov yeeb yaj kiab nyias nyias thiab qhov tseeb siab. Cov txheej txheem ib txwm muaj rau magnetron sputtering txheej yog: kev ua haujlwm siab ntawm 0.1Pa; lub hom phiaj voltage ntawm 300 ~ 700V; lub hom phiaj zog ceev ntawm 1 ~ 36W / cm².

Cov yam ntxwv tshwj xeeb ntawm magnetron sputtering yog:

(1) Tus nqi tso tawm siab. Vim yog siv cov electrodes magnetron, tuaj yeem tau txais cov ion tam sim no loj heev, yog li tus nqi etching sputtering ntawm qhov chaw ntawm lub hom phiaj thiab tus nqi tso zaj duab xis ntawm qhov chaw substrate yog ob qho tib si siab heev.

(2) Kev siv hluav taws xob zoo heev. Qhov feem pua ​​ntawm kev sib tsoo ntawm cov electrons uas tsis muaj zog thiab cov roj atoms siab heev, yog li ntawd qhov kev sib cais ntawm cov roj tau nce ntxiv ntau heev. Yog li ntawd, qhov impedance ntawm cov roj tawm (lossis plasma) tau txo qis heev. Yog li ntawd, DC magnetron sputtering piv rau DC dipole sputtering, txawm tias qhov siab ua haujlwm raug txo los ntawm 1 ~ 10Pa mus rau 10-210-1Pa sputtering voltage kuj raug txo los ntawm ntau txhiab volts mus rau ntau pua volts, sputtering efficiency thiab deposition rate tau nce ntxiv los ntawm kev txiav txim siab ntawm qhov loj me.

– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua