Uma kuqhathaniswa nobunye ubuchwepheshe bokuhlanganisa, i-magnetron sputtering coating ibonakala ngezici ezilandelayo: imingcele yokusebenza inohlu olukhulu lokulungiswa okuguquguqukayo kwejubane lokubeka i-coating kanye nokuqina (isimo sendawo eboshwe) ingalawulwa kalula, futhi akukho mkhawulo wokuklama ku-geometry yethagethi ye-magnetron ukuqinisekisa ukufana kwe-coating; ayikho inkinga yezinhlayiya ze-droplet kungqimba lwefilimu; cishe zonke izinsimbi, ingxubevange, nezitsha zobumba zingenziwa zibe izinto eziqondiwe; futhi into eqondiwe ingakhiqizwa yi-DC noma i-RF magnetron sputtering, engakhiqiza insimbi emsulwa noma ingxubevange enesilinganiso esinembile, kanye namafilimu ensimbi asebenza ngokuhlanganyela negesi. Ngokusebenzisa i-DC noma i-RF sputtering, kungenzeka ukukhiqiza insimbi emsulwa noma ingxubevange enezilinganiso ezinembile nezingashintshi, kanye namafilimu ensimbi asebenza ngokuhlanganyela negesi, ukuze kuhlangatshezwane nezidingo zokuhlukahluka kwefilimu emincane nokunemba okuphezulu. Imingcele yenqubo evamile ye-magnetron sputtering coating yilezi: ingcindezi yokusebenza engu-0.1Pa; I-voltage eqondiwe ye-300 ~ 700V; ukuminyana kwamandla okuqondisiwe okungu-1~36W/cm².
Izici ezithile ze-magnetron sputtering yilezi:
(1) Izinga eliphezulu lokubeka imali. Ngenxa yokusetshenziswa kwama-electrode azibuthe, kungatholwa i-ion ye-bhombardment ion enkulu kakhulu eqondiwe, ngakho izinga lokuphuma kwe-sputter endaweni eqondiwe kanye nezinga lokubeka ifilimu endaweni engaphansi kokubili kuphezulu kakhulu.
(2) Ukusebenza kahle kwamandla aphezulu. Amathuba okushayisana kwama-electron anamandla aphansi nama-athomu egesi aphakeme, ngakho izinga lokuhlukaniswa kwegesi lenyuka kakhulu. Ngakho-ke, ukuvinjelwa kwegesi yokukhipha (noma i-plasma) kuyancipha kakhulu. Ngakho-ke, i-DC magnetron sputtering uma iqhathaniswa ne-DC dipole sputtering, ngisho noma ingcindezi yokusebenza yehlisiwe isuka ku-1~10Pa iye ku-10-210-1Pa voltage sputtering nayo iyancishiswa isuka ezinkulungwaneni zama-volts iye kumakhulu ama-volts, ukusebenza kahle kokusputtering kanye nezinga lokubeka liyakhuphuka ngemiyalo yobukhulu.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Dec-01-2023