Xa kuthelekiswa nobunye ubugcisa bokugquma, i-magnetron sputtering coating iphawulwa ngezi mpawu zilandelayo: iiparameters zokusebenza zinoluhlu olukhulu lohlengahlengiso oluguquguqukayo lwesantya sokubeka ukutyabeka kunye nobukhulu (imeko yendawo egqunyiweyo) inokulawulwa lula, kwaye akukho mda woyilo kwijometri yethagethi yemagnetron ukuqinisekisa ukufana kwengubo; akukho ngxaki ye-droplet particles kuluhlu lwefilimu; phantse zonke isinyithi, i-alloys, kunye neeseramics zingenziwa zibe yimathiriyeli ekujoliswe kuyo; kunye nemathiriyeli ekujoliswe kuyo inokuveliswa yi-DC okanye i-RF magnetron sputtering, enokuvelisa isinyithi esisulungekileyo okanye i-alloy coatings ngomlinganiselo ochanekileyo, kunye neefilimu ezisebenza ngesinyithi ngokuthatha inxaxheba kwegesi. Ngokusebenzisa i-DC okanye i-RF sputtering, kuyenzeka ukuba kuveliswe intsimbi esulungekileyo okanye ialloyi yokwaleka ngomlinganiselo ochanekileyo nongaguquguqukiyo, kunye neefilim zentsimbi ezisebenza ngentatho-nxaxheba yegesi, ukuhlangabezana neemfuno zeyantlukwano yefilimu ebhityileyo kunye nokuchaneka okuphezulu. Iiparamitha zenkqubo eqhelekileyo ye-magnetron sputtering coating zezi: uxinzelelo lokusebenza lwe-0.1Pa; umbane ekujoliswe kuwo we-300 ~ 700V; Uxinzelelo lwamandla ekujoliswe kuwo yi-1~36W/cm².
Iimpawu ezithile ze-magnetron sputtering zezi:
(1) Izinga eliphezulu lokubekwa. Ngenxa yokusetyenziswa kwee-electrode zemagnetron, i-ion enkulu ekujoliswe kuyo inokufumaneka, ngoko ke izinga lokutsiba isiphalaphala kwindawo ekujoliswe kuyo kunye nesantya sokubekwa kwefilimu kumphezulu we-substrate zombini ziphezulu kakhulu.
(2) Ukusebenza kwamandla aphezulu. Amathuba okudibana kwee-electron eziphantsi kwamandla kunye nee-athomu zegesi ziphezulu, ngoko ke izinga lokuqhawula igesi liye landa kakhulu. Ngokuhambelanayo, i-impedance yegesi yokukhupha (okanye i-plasma) iyancipha kakhulu. Ke ngoko, i-DC magnetron sputtering xa ithelekiswa ne-DC dipole sputtering, nokuba uxinzelelo lokusebenza luncitshisiwe ukusuka kwi-1 ~ 10Pa ukuya kwi-10-210-1Pa i-voltage ye-sputtering nayo iyancitshiswa ukusuka kumawaka e-volts ukuya kumakhulu e-volts, ukusebenza kakuhle kwe-sputtering kunye nezinga lokubeka linyuswa ngemiyalelo yobukhulu.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Dec-01-2023