Marka la barbardhigo teknoolojiyadda daahan kale, daahan magnetron sputtering daahan waxaa lagu gartaa sifooyinka soo socda: xuduudaha shaqada leeyihiin kala duwanaansho isbedel firfircoon weyn ee daahan xawaaraha dhigaalka iyo dhumucdiisuna (xaalad aagga dahaarka ah) si fudud loo xakameeyo karaa, oo ma jiraan xaddiday design on joomatari bartilmaameedka magnetron si loo hubiyo in lebbiska ee daahan; ma jiraan wax dhib ah oo ka mid ah qaybaha dhibcaha ee lakabka filimka; Ku dhawaad dhammaan biraha, alwaaxyada, iyo ceramics waxa laga samayn karaa agab bartilmaameed; iyo walxaha bartilmaameedka ah waxaa soo saari kara by DC ama RF magnetron sputtering, kaas oo dhalin kara biraha saafiga ah ama daahan alloy saamiga saxda ah, iyo sidoo kale biraha falcelin biraha ka qayb gaaska. Iyada oo loo marayo DC ama RF sputtering, waxaa suurtagal ah in la abuuro bir saafi ah ama dahaaryo alloy ah oo leh saamiyo sax ah oo joogto ah, iyo sidoo kale filimada falcelinta birta ah ee ka qaybgalka gaaska, si loo buuxiyo shuruudaha kala duwanaanshaha filimada khafiifka ah iyo saxnaanta sare. Halbeegyada habka caadiga ah ee daahanka sputtering magnetron waa: cadaadiska shaqada ee 0.1Pa; danab bartilmaameedka 300 ~ 700V; cufnaanta awoodda bartilmaameedka ah ee 1 ~ 36W/cm².
Astaamaha gaarka ah ee sputtering magnetron waa:
(1) Heerka dhigaalka sare. Iyadoo ay ugu wacan tahay isticmaalka electrodes-ka magnetron-ka, ion hadda la beegsanayo oo aad u weyn ayaa la heli karaa, markaa heerka xajinta ee dusha sare ee bartilmaameedka iyo heerka kaydinta filimka ee dusha substrate labaduba waa mid aad u sarreeya.
(2) Waxtarka awoodda sare. Itimaalka isku dhaca elektaroonigga tamarta yar iyo atamka gaaska ayaa aad u sarreeya, sidaa darteed heerka kala-goynta gaaska ayaa si weyn u kordhay. Sidaas awgeed, xannibaadda gaasta dheecaanka ah (ama balasmaha) ayaa si weyn loo dhimay. Sidaa darteed, DC magnetron sputtering marka la barbar dhigo DC dipole sputtering, xitaa haddii cadaadiska shaqada la dhimay 1 ~ 10Pa in 10-210-1Pa danab sputtering sidoo kale waa la dhimay ka kumanaan volts ilaa boqollaal volts, hufnaanta sputtering iyo heerka dhigista waxaa la kordhiyaa by amarrada of magnitude.
–Maqaalkan waxa soo saaraysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua
Waqtiga boostada: Dec-01-2023