Kuenzaniswa nemamwe matekinoroji ekuputira, magnetron sputtering coating inoratidzwa neanotevera maficha: iyo inoshanda ma paramita ane yakakura dhizaini yekugadziriswa kweiyo coating deposition kumhanya uye ukobvu (iyo mamiriro enzvimbo yakavharwa) inogona kudzorwa nyore, uye hapana dhizaini yekumisikidza pa geometry ye magnetron chinangwa kuti ive nechokwadi chekufanana kwejasi; hapana dambudziko remadonhwe particles mumutsara wefirimu; dzinenge simbi dzese, alloys, uye ceramics zvinogona kugadzirwa muzvinhu zvinonangwa; uye izvo zvinonangwa zvinogona kugadzirwa neDC kana RF magnetron sputtering, iyo inogona kugadzira simbi yakachena kana alloy coatings ine chaiyo reshiyo, pamwe nesimbi reactive mafirimu ane gasi kutora chikamu. Kuburikidza neDC kana RF sputtering, zvinokwanisika kugadzira simbi yakachena kana alloy coating ine chaiyo uye inogara mareshiyo, pamwe nesimbi inodzoreredza mafirimu ane gasi kutora chikamu, kuzadzisa zvinodikanwa zvemafirimu akaonda akasiyana uye nepamusoro nemazvo. Typical process parameters for magnetron sputtering coating are: kushanda kudzvinyirirwa kwe0.1Pa; chinangwa chemagetsi che 300 ~ 700V; chinangwa chesimba density ye1 ~ 36W/cm².
Iwo chaiwo maficha emagnetron sputtering ndeaya:
(1) High deposition rate. Nekuda kwekushandiswa kwemagineti maelectrodes, hombe chaiyo yakananga bombardment ion ikozvino inogona kuwanikwa, saka sputter etching rate pane inotangwa uye firimu deposition rate pane substrate surface zvese zvakakwirira zvakanyanya.
(2) Kushanda nesimba kwepamusoro. Iko kudhumhana mukana wepasi-simba maerekitironi uye gasi maatomu akakwira, saka gasi dissociation mwero wakawedzera zvakanyanya. Saizvozvo, iyo impedance yekubuda gasi (kana plasma) yakaderedzwa zvakanyanya. Naizvozvo, DC magnetron sputtering kana ichienzaniswa neDC dipole sputtering, kunyangwe kudzvanywa kwekushanda kwakaderedzwa kubva 1 ~ 10Pa kusvika 10-210-1Pa sputtering voltage inoderedzwawo kubva kuzviuru zvevolts kusvika kumazana emavolts, sputtering kunyatsoshanda uye deposition rate inowedzerwa nemirairo yehukuru.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Zvita-01-2023