Ugereranije nubundi buryo bwa tekinoroji yo gutwikisha, magnetron sputtering coating irangwa nibintu bikurikira: ibipimo byakazi bifite urwego runini rwo guhindura ibintu byerekana umuvuduko mwinshi hamwe nubunini (imiterere yakarere kegeranye) birashobora kugenzurwa byoroshye, kandi nta gishushanyo mbonera cyerekana kuri geometrike yintego ya magnetron kugirango habeho uburinganire; ntakibazo cyibitonyanga bitonyanga murwego rwa firime; hafi ibyuma byose, ibivanze, nubutaka birashobora gukorwa mubikoresho bigenewe; nibikoresho bigenewe bishobora gukorwa na DC cyangwa RF magnetron sputtering, ishobora kubyara ibyuma bisukuye cyangwa ibishishwa bifatanye neza, hamwe na firime ikora ibyuma byitabira gaze. Binyuze muri DC cyangwa RF gusohora, birashoboka kubyara ibyuma bisukuye cyangwa ibishishwa byuzuye bifite ibipimo nyabyo kandi bihoraho, hamwe na firime yerekana ibyuma byitabira gaze, kugirango byuzuze ibisabwa muburyo butandukanye bwa firime yoroheje kandi neza. Ibipimo bisanzwe byuburyo bwa magnetron sputtering coating ni: umuvuduko wakazi wa 0.1Pa; intego ya voltage ya 300 ~ 700V; intego yubucucike bwa 1 ~ 36W / cm².
Ibintu byihariye biranga magnetron gusohora ni:
(1) Igipimo kinini cyo kubitsa. Bitewe no gukoresha electrode ya magnetron, hashobora kuboneka intego nini cyane yo gutera ibisasu ion igezweho, bityo igipimo cyo gutera sputter hejuru yintego hamwe nigipimo cya firime hejuru yubutaka byombi biri hejuru cyane.
(2) Gukoresha ingufu nyinshi. Impanuka zo guhura na electron zifite ingufu nke na atome ya gaze ni nyinshi, bityo igipimo cyo gutandukana gaze cyiyongereye cyane. Kubwibyo, inzitizi ya gaze isohoka (cyangwa plasma) iragabanuka cyane. Kubwibyo rero, DC magnetron isohoka ugereranije na DC dipole isohoka, nubwo umuvuduko wakazi wagabanutse uva kuri 1 ~ 10Pa ukagera kuri 10-210-1Pa ya sputtering voltage nayo igabanuka kuva kuri volt ibihumbi kugeza kuri volt amagana, gukora neza no kugabanuka byiyongera kubitegeko byubunini.
–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua
Igihe cyo kohereza: Ukuboza-01-2023