Makhalidwe a sputtering coating films

① Kuwongolera bwino komanso kubwereza kwa makulidwe a kanema

Kaya makulidwe a kanema atha kuyendetsedwa pamtengo wodziwikiratu amatchedwa kuwongolera makulidwe a kanema. Kufunika kwa filimu makulidwe akhoza kubwerezedwa nthawi zambiri, wotchedwa filimu makulidwe repeatability.Chifukwa kumaliseche panopa ndi chandamale cha ❖ kuyanika sputtering ❖ kuyankhidwa padera. Chifukwa chake, makulidwe a filimu ya sputtered amatha kuwongolera, ndipo filimuyo yokhala ndi makulidwe odziwikiratu imatha kuyikidwa modalirika. Kuphatikiza apo, zokutira za sputter zimatha kupeza filimu yokhala ndi makulidwe a yunifolomu pamtunda waukulu.

② Kumamatira mwamphamvu pakati pa filimu ndi gawo lapansi

Mphamvu ya maatomu opukutidwa ndi maoda a 1-2 a ukulu kuposa ma atomu otuluka. Kutembenuka kwamphamvu kwa maatomu ophulika amphamvu kwambiri omwe amayikidwa pagawo laling'ono ndikwambiri kuposa ma atomu otuluka, omwe amatulutsa kutentha kwakukulu ndikuwonjezera kumamatira pakati pa maatomu ophwanyidwa ndi gawo lapansi. Kuphatikiza apo, maatomu ena okhala ndi mphamvu zambiri amatulutsa jekeseni wosiyanasiyana, kupanga pseudodiffusion wosanjikiza pa gawo lapansi. Kuphatikiza apo, gawo lapansili nthawi zonse limatsukidwa ndikuyatsidwa m'chigawo cha plasma panthawi yopanga filimu, yomwe imachotsa maatomu otayira ndi zomatira zofooka, ndikuyeretsa ndikuyambitsa gawo lapansi. Choncho, filimu sputtered ali amphamvu zomatira ku gawo lapansi.

③ Kanema watsopano wosiyana ndi chandamale atha kukonzedwa

Ngati mpweya wotuluka umayambitsidwa panthawi ya sputtering kuti igwirizane ndi chandamale, filimu yatsopano yosiyana kwambiri ndi yomwe mukufuna ingapezeke. Mwachitsanzo, silicon imagwiritsidwa ntchito ngati chandamale cha sputtering, ndipo mpweya ndi argon zimayikidwa mu chipinda chopulumutsira pamodzi. Pambuyo sputtering, SiOz insulating filimu akhoza analandira. Pogwiritsa ntchito titaniyamu monga chandamale cha sputtering, nayitrogeni ndi argon zimayikidwa mu chipinda chotsekera pamodzi, ndipo gawo la TiN filimu yonga golide imatha kupezeka pambuyo pa kulavula.

④ Kuyera kwambiri komanso filimu yabwino

Popeza palibe chigawo cha crucible mu sputtering filimu kukonzekera chipangizo, zigawo zikuluzikulu za crucible chotenthetsera zinthu sizidzasakanizidwa mu sputtering filimu wosanjikiza. The kuipa sputtering ❖ kuyanika ndi kuti filimu kupanga liwiro ndi pang'onopang'ono kuposa ❖ kuyanika evaporation, gawo lapansi kutentha ndi apamwamba, n'zosavuta kukhudzidwa ndi mpweya wodetsedwa, ndipo dongosolo chipangizo ndi zovuta kwambiri.

Nkhaniyi idasindikizidwa ndi Guangdong Zhenhua, wopangazida zokutira vacuum