Makhalidwe a magnetron sputtering coating Chapter 1

Poyerekeza ndi umisiri ena ❖ kuyanika, magnetron sputtering ❖ kuyanika amakhala ndi zinthu zotsatirazi: magawo ntchito ndi lalikulu zazikulu kusintha osiyanasiyana ❖ kuyanika mafunsidwe liwiro ndi makulidwe (boma la TACHIMATA dera) akhoza kulamulidwa mosavuta, ndipo palibe malire kapangidwe pa geometry chandamale magnetron kuonetsetsa yunifolomu ❖ kuyanika; palibe vuto la particles droplet mu filimu wosanjikiza; pafupifupi zitsulo zonse, aloyi, ndi zitsulo zadothi zikhoza kupangidwa kukhala zipangizo chandamale; ndi zinthu zomwe mukufunazo zitha kupangidwa ndi DC kapena RF magnetron sputtering, yomwe imatha kupanga zokutira zachitsulo kapena aloyi ndi chiŵerengero cholondola, komanso mafilimu ochita zitsulo omwe ali ndi gasi. Kupyolera mu DC kapena RF sputtering, ndizotheka kupanga zokutira zitsulo zoyera kapena aloyi ndi zofananira zolondola komanso zosasinthasintha, komanso mafilimu opangira zitsulo omwe ali ndi gasi, kuti akwaniritse zofunikira za kusiyana kwa mafilimu ochepa komanso olondola kwambiri. Chitsanzo ndondomeko magawo kwa magnetron sputtering ❖ kuyanika ndi: ntchito kuthamanga kwa 0.1Pa; voteji chandamale cha 300 ~ 700V; chandamale mphamvu kachulukidwe wa 1 ~ 36W/cm².

Makhalidwe apadera a magnetron sputtering ndi awa:

(1) Mtengo wokwera kwambiri. Chifukwa cha kugwiritsa ntchito ma elekitirodi a magnetron, chandamale chachikulu kwambiri cha bombardment ion pakali pano chingapezeke, kotero kuti sputter etching rate pa chandamale chandamale ndi kuchuluka kwa filimuyo pamtunda wapansi panthaka ndizokwera kwambiri.

(2) Kugwiritsa ntchito mphamvu kwambiri. Kugundana kwamphamvu kwa ma elekitironi otsika mphamvu ndi ma atomu a gasi ndikwambiri, motero kuchuluka kwa kutha kwa gasi kumawonjezeka kwambiri. Chifukwa chake, kutsekeka kwa mpweya wotuluka (kapena plasma) kumachepetsedwa kwambiri. Choncho, DC magnetron sputtering poyerekeza ndi DC dipole sputtering, ngakhale kuthamanga ntchito yafupika kuchokera 1 ~ 10Pa kuti 10-210-1Pa sputtering voteji nawonso yafupika masauzande volts mazana volts, sputtering dzuwa ndi deposition mlingo wachulukitsidwa ndi malamulo kukula.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua