E jiri ya tụnyere teknụzụ mkpuchi ndị ọzọ, ihe mkpuchi magnetron sputtering bụ nke e ji njirimara ndị a mara: ihe ndị na-arụ ọrụ nwere nnukwu mgbanwe mgbanwe dị iche iche nke mkpuchi mkpuchi ọsọ ọsọ na ọkpụrụkpụ (ọnọdụ nke ebe mkpuchi) nwere ike ịchịkwa ngwa ngwa, ọ dịghịkwa mmachi imewe na geometry nke magnetron lekwasịrị anya iji hụ na ịdị n'otu nke mkpuchi ahụ; ọ dịghị nsogbu nke ụmụ irighiri mmiri na-emepụta ihe na oyi akwa ihe nkiri; ihe fọrọ nke nta ka ọ bụrụ ọla niile, alloys, na ceramics nwere ike ịbụ ihe ezubere iche; na ihe ezubere iche nwere ike imepụta site na DC ma ọ bụ RF magnetron sputtering, nke nwere ike iwepụta metal dị ọcha ma ọ bụ ihe mkpuchi alloy nwere oke ruru, yana ihe nkiri na-emeghachi ihe igwe nwere ike itinye gas. Site na DC ma ọ bụ RF sputtering, ọ ga-ekwe omume ịmepụta metal dị ọcha ma ọ bụ ihe mkpuchi alloy nke nwere ọnụ ọgụgụ ziri ezi na nke na-adịgide adịgide, yana ihe nkiri na-emeghachi omume nke ígwè na nsonye gas, iji mezuo ihe achọrọ dị iche iche ihe nkiri dị mkpa na nkenke dị elu. Ụdị usoro usoro maka mkpuchi magnetron sputtering bụ: nrụgide ọrụ nke 0.1Pa; lekwasịrị anya voltaji nke 300 ~ 700V; Ebumnuche ike njupụta nke 1 ~ 36W/cm².
Akụkụ dị iche iche nke magnetron sputtering bụ:
(1) Ọnụ ego nkwụnye ego dị elu. N'ihi iji magnetron elektrọn, enwere ike nweta nnukwu ebumnuche bombu ion ugbu a, yabụ na ọnụego etching n'elu ebumnuche na ọnụego ntinye ihe nkiri n'elu ala dị oke elu.
(2) Ịrụ ọrụ ike dị elu. Nkwekọrịta ihe gbasara nke puru omume nke electrons na gas dị ala dị elu, ya mere ọnụ ọgụgụ nkewa gas na-abawanye nke ukwuu. N'ihi ya, mgbochi nke gas na-epupụta (ma ọ bụ plasma) na-ebelata nke ukwuu. Ya mere, DC magnetron sputtering tụnyere DC dipole sputtering, ọbụna ma ọ bụrụ na arụ ọrụ nrụgide na-ebelata si 1 ~ 10Pa ka 10-210-1Pa sputtering voltaji na-ebelatakwa site na puku kwuru puku volts na narị volts, sputtering arụmọrụ na deposition ọnụego na-abawanye site n'iwu nke ịdị ukwuu.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Dec-01-2023