Piv nrog rau lwm cov txheej txheem txheej txheej, magnetron sputtering txheej yog cov yam ntxwv ntawm cov hauv qab no: cov kev ua haujlwm tsis muaj kev hloov pauv loj ntawm txheej txheej txheej ceev thiab tuab (lub xeev ntawm thaj chaw coated) tuaj yeem tswj tau yooj yim, thiab tsis muaj kev txwv tsim ntawm lub hom phiaj ntawm lub hom phiaj magnetron los xyuas kom meej qhov sib xws ntawm txheej; tsis muaj teeb meem ntawm cov tee me me hauv cov zaj duab xis txheej; yuav luag tag nrho cov hlau, alloys, thiab ceramics tuaj yeem ua rau cov khoom siv; thiab cov khoom siv lub hom phiaj tuaj yeem tsim los ntawm DC los yog RF magnetron sputtering, uas tuaj yeem tsim cov hlau ntshiab lossis cov hlau alloy nrog cov qauv meej, nrog rau cov hlau reactive films nrog kev koom tes nrog roj. Los ntawm DC los yog RF sputtering, nws muaj peev xwm tsim cov hlau ntshiab los yog alloy coatings nrog meej thiab qhov sib piv, nrog rau cov hlau reactive films nrog roj kev koom tes, kom ua tau raws li qhov yuav tsum tau ntawm nyias zaj duab xis ntau haiv neeg thiab siab precision. Cov txheej txheem tsis zoo rau magnetron sputtering txheej yog: ua haujlwm siab ntawm 0.1Pa; Lub hom phiaj voltage ntawm 300 ~ 700V; Lub hom phiaj zog ceev ntawm 1 ~ 36W / cm².
Cov yam ntxwv tshwj xeeb ntawm magnetron sputtering yog:
(1) High deposition tus nqi. Vim yog siv cov magnetron electrodes, lub hom phiaj loj heev ntawm kev sib tsoo ion tam sim no tuaj yeem tau txais, yog li qhov sputter etching tus nqi ntawm lub hom phiaj nto thiab zaj duab xis deposition tus nqi ntawm lub substrate nto yog ob qho tib si siab heev.
(2) Kev ua haujlwm siab zog. Kev sib tsoo qhov tshwm sim ntawm cov hluav taws xob qis hluav taws xob thiab cov roj atoms yog siab, yog li cov roj dissociation tus nqi tau nce ntau. Yog li, qhov impedance ntawm cov pa tawm (los yog ntshav) txo qis heev. Yog li ntawd, DC magnetron sputtering piv nrog DC dipole sputtering, txawm tias lub siab ua hauj lwm raug txo los ntawm 1 ~ 10Pa mus rau 10-210-1Pa sputtering voltage kuj txo los ntawm ntau txhiab volts mus rau pua pua ntawm volts, sputtering efficiency thiab deposition tus nqi yog nce los ntawm kev txiav txim ntawm magnitude.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Dec-01-2023