Idan aka kwatanta da sauran fasahar shafi, magnetron sputtering shafi ne halin da wadannan fasali: da aiki sigogi da babban tsauri daidaitawa kewayon shafi ajiya gudun da kauri (jihar da rufi yankin) za a iya sauƙi sarrafa, kuma babu wani zane iyakance a kan lissafi na magnetron manufa don tabbatar da uniformity na shafi; babu matsala na barbashi droplet a cikin fim din Layer; kusan dukkanin karafa, gami, da yumbu za a iya sanya su su zama kayan da aka yi niyya; da manufa abu za a iya samar da DC ko RF magnetron sputtering, wanda zai iya samar da tsantsa karfe ko gami coatings tare da daidai rabo, kazalika da karfe reactive fina-finai tare da iskar gas. Ta hanyar DC ko RF sputtering, yana yiwuwa a samar da tsantsa karfe ko gami coatings tare da daidai da akai rabo, kazalika da karfe reactive fina-finai tare da iskar gas, don saduwa da bukatun na bakin ciki bambancin fim da high daidaici. Alamar tsari sigogi ga magnetron sputtering shafi ne: aiki matsa lamba na 0.1Pa; manufa irin ƙarfin lantarki na 300 ~ 700V; Maƙasudin ƙarfin ƙarfi na 1 ~ 36W/cm².
Musamman fasali na magnetron sputtering sune:
(1) Yawan ajiya mai girma. Saboda amfani da na'urorin lantarki na magnetron, ana iya samun babban adadin ion halin yanzu na bombardment, don haka ƙimar etching a saman da aka yi niyya da ƙimar jigilar fina-finai akan saman ƙasa duka biyu suna da girma sosai.
(2) Babban ƙarfin ƙarfi. Yiwuwar karo na ƙananan kuzarin lantarki da atom ɗin gas yana da yawa, don haka ƙimar rabuwar iskar gas yana ƙaruwa sosai. Sabili da haka, ƙarancin iskar gas (ko plasma) yana raguwa sosai. Saboda haka, DC magnetron sputtering idan aka kwatanta da DC dipole sputtering, ko da aiki matsa lamba da aka rage daga 1 ~ 10Pa zuwa 10-210-1Pa sputtering ƙarfin lantarki kuma an rage daga dubban volts zuwa daruruwan volts, sputtering yadda ya dace da deposition kudi yana karuwa da umarni na girma.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Dec-01-2023