Cov khoom siv no siv cov hom phiaj magnetron los hloov cov khoom siv txheej rau hauv cov khoom me me nanometer, uas tau muab tso rau ntawm qhov chaw ntawm cov substrates los ua cov zaj duab xis nyias. Cov zaj duab xis dov tau muab tso rau hauv lub tshuab nqus tsev. Los ntawm cov qauv winding uas tsav los ntawm hluav taws xob, ib kawg tau txais cov zaj duab xis thiab lwm qhov muab cov zaj duab xis tso rau. Nws txuas ntxiv mus dhau thaj chaw phiaj thiab tau txais cov khoom me me los ua cov zaj duab xis ntom ntom.
Yam ntxwv:
1. Kev tsim zaj duab xis kub tsawg. Qhov kub tsis muaj feem cuam tshuam rau zaj duab xis thiab yuav tsis ua rau deformation. Nws yog qhov tsim nyog rau PET, PI thiab lwm yam khoom siv hauv paus coil zaj duab xis.
2. Lub thickness ntawm zaj duab xis tuaj yeem tsim tau. Cov txheej txheej nyias lossis tuab tuaj yeem tsim thiab tso los ntawm kev hloov kho cov txheej txheem.
3. Tsim ntau qhov chaw rau ntau lub hom phiaj, cov txheej txheem hloov pauv tau. Tag nrho lub tshuab tuaj yeem nruab nrog yim lub hom phiaj, uas tuaj yeem siv ua cov hom phiaj hlau yooj yim lossis cov hom phiaj sib xyaw thiab oxide. Nws tuaj yeem siv los npaj cov yeeb yaj kiab ib txheej nrog ib qho qauv lossis cov yeeb yaj kiab ntau txheej nrog cov qauv sib xyaw. Cov txheej txheem no hloov pauv tau yooj yim heev.
Cov khoom siv tuaj yeem npaj cov zaj duab xis tiv thaiv hluav taws xob, cov txheej txheem hluav taws xob yooj ywm, ntau yam zaj duab xis dielectric, ntau txheej AR antireflection zaj duab xis, HR siab antireflection zaj duab xis, xim zaj duab xis, thiab lwm yam. Cov khoom siv muaj ntau yam kev siv, thiab ib txheej zaj duab xis deposition tuaj yeem ua tiav los ntawm ib zaug zaj duab xis deposition.
Cov khoom siv tuaj yeem siv cov hom phiaj hlau yooj yim xws li Al, Cr, Cu, Fe, Ni, SUS, TiAl, thiab lwm yam, lossis cov hom phiaj sib xyaw xws li SiO2, Si3N4, Al2O3, SnO2, ZnO, Ta2O5, ITO, AZO, thiab lwm yam.
Cov khoom siv no me me, tsim qauv me me, thaj chaw hauv pem teb me me, siv hluav taws xob tsawg, thiab hloov kho tau yooj yim. Nws zoo heev rau kev tshawb fawb thiab kev txhim kho lossis kev tsim khoom me me.