COV KHOOM PIAV TXOG
Cov khoom siv txheej txheej sim dov mus rau dov siv cov thev naus laus zis txheej ua ke magnetron sputtering thiab cathode arc, uas ua tau raws li qhov yuav tsum tau ua ntawm ob qho tib si zaj duab xis compactness thiab siab ionization rate. Cov khoom siv yog ntawm cov qauv ntsug, thiab lub workpiece winding system yog vertically ntsia rau hauv lub tshuab nqus tsev. Multi chamber qhov rooj tsim, lub cathode yog ntsia rau ntawm lub qhov rooj sab, rau pawg ntawm cathode qhov chaw lossis ion qhov chaw tuaj yeem ntsia tau, thiab lub hom phiaj tuaj yeem tswj hwm lossis hloov pauv thaum lub qhov rooj qhib. Cov khoom siv tuaj yeem ua kev kho qhov chaw ua haujlwm thiab ntau txheej txheej ib zaug kom paub txog ntau txheej zaj duab xis deposition. Haum rau ntau yam hlau lossis cov ntaub ntawv txheej sib xyaw.
Cov khoom siv no muaj cov yam ntxwv ntawm qhov zoo nkauj, cov qauv me me, thaj chaw hauv pem teb me me, qib siab ntawm kev ua haujlwm tsis siv neeg, kev ua haujlwm yooj yim thiab hloov pauv tau, kev ua haujlwm ruaj khov thiab kev saib xyuas yooj yim. Nws yog qhov tshwj xeeb tshaj yog rau kev siv hauv chaw soj nstuam thiab tsev kawm qib siab. Cov neeg siv khoom tuaj yeem xaiv raws li lawv cov kev xav tau sib txawv.
| Cov qauv xaiv tau | Qhov loj ntawm cov khoom siv (dav) |
| RCW300 | 300 hli |
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