Lolu chungechunge lwemishini lusebenzisa ama-magnetron target ukuguqula izinto zokumboza zibe izinhlayiya ezinobukhulu be-nanometer, ezibekwa phezu kwezingxenye ezingaphansi komhlaba ukuze zakhe amafilimu amancane. Ifilimu egoqiwe ifakwa ekamelweni le-vacuum. Ngesakhiwo esijikelezayo esiqhutshwa ngogesi, uhlangothi olulodwa lwamukela ifilimu kanti olunye lubeka ifilimu. Iyaqhubeka idlula endaweni eqondiwe futhi yamukela izinhlayiya eziqondiwe ukuze yakhe ifilimu exinene.
Isici:
1. Ukwakheka kwefilimu emazingeni okushisa aphansi. Izinga lokushisa alinawo umthelela omkhulu efilimini futhi ngeke lidale ukuguguleka. Lifanele amafilimu e-PET, PI kanye namanye ama-coil ezinto eziyisisekelo.
2. Ubukhulu befilimu bungaklanywa. Ukwembozwa okuncane noma okujiyile kungaklanywa futhi kubekwe ngokulungiswa kwenqubo.
3. Umklamo wendawo eqondiwe eminingi, inqubo eguquguqukayo. Umshini wonke ungafakelwa ama-target ayisishiyagalombili, angasetshenziswa njenge-target elula yensimbi noma ama-target e-compound ne-oxide. Ungasetshenziswa ukulungiselela amafilimu anesendlalelo esisodwa anesakhiwo esisodwa noma amafilimu anesendlalelo esiningi anesakhiwo esihlanganisiwe. Inqubo iguquguquka kakhulu.
Imishini ingalungisa ifilimu yokuvikela kagesi, i-flexible circuit board coating, amafilimu ahlukahlukene e-dielectric, ifilimu yokuvimbela ukubonakaliswa kwe-AR enezingqimba eziningi, ifilimu yokuvimbela ukubonakaliswa kwe-HR ephezulu, ifilimu yombala, njll. Imishini inezinhlelo zokusebenza eziningi kakhulu, futhi ukufakwa kwefilimu enezingqimba eyodwa kungaqedwa ngokufakwa kwefilimu okukodwa.
Imishini ingasebenzisa amatshe ensimbi alula njenge-Al, Cr, Cu, Fe, Ni, SUS, TiAl, njll., noma amatshe ahlanganisiwe njenge-SiO2, Si3N4, Al2O3, SnO2, ZnO, Ta2O5, ITO, AZO, njll.
Imishini mincane ngobukhulu, incane ngokwakhiwa kwesakhiwo, incane endaweni yephansi, iphansi ekusebenziseni amandla, futhi iguquguquka ngokuguquguquka. Ifaneleka kakhulu ocwaningweni lwenqubo kanye nokuthuthukiswa noma ekukhiqizweni kwenqwaba encane.