Uburyo bwo gusiga irangi ry'ingufu ntoya

Uburyo bwo gusiga irangi rya cathodic arc source ion muri rusange ni kimwe n'ubundi buryo bwo gusiga irangi, kandi ibikorwa bimwe na bimwe nko gushyiraho ibikoresho byo gukora no gusukura irangi ntibikivugururwa.

1. Gusukura ibikoresho byo mu rugo hakoreshejwe ibisasu

Mbere yo gusiga irangi, gaze ya argon yinjizwa mu cyumba cyo gusiga irangi gifite umwuka wa 2×10-2Pa.

Fungura amashanyarazi ya pulse bias, hamwe n'umuvuduko wa 20% n'umuvuduko wa workpiece wa 800-1000V.

Iyo ingufu za arc zifunguye, urumuri rw'arc rukonje rurasohoka, rusohora ingano nini ya electron current na titanium ion current biva muri arc source, bigatuma habaho plasma ifite ubucucike bwinshi. Iyoni ya titanium yihutisha ishyirwa ryayo muri workpiece munsi y'umuvuduko wa negative high bias ushyirwa kuri workpiece, igatera kandi igasuka umwuka n'imyanda bisigaye byinjira ku buso bw'workpiece, kandi igasukura kandi igasukura ubuso bw'workpiece; Muri icyo gihe, gaze ya chlorine iri mu cyumba cyo gusiga irangi ikoreshwa na electron, kandi iyoni za argon zigatera kwihuta mu buso bw'workpiece.

Bityo, ingaruka zo gusukura icyuma gishyushya ni nziza. Umunota umwe gusa wo gusukura icyuma gishyushya ni wo ushobora gusukura icyuma gishyushya, cyitwa "icyuma gishyushya icyuma gishyushya". Bitewe n'uburemere bwinshi bwa ioni za titaniyumu, iyo isoko ntoya y'icyuma ikoreshejwe mu gusukura icyuma gishyushya no gusukura icyuma gishyushya igihe kirekire, ubushyuhe bw'icyuma gishyushya bushobora gushyuha cyane, kandi impande z'igikoresho zishobora koroha. Muri rusange, amasoko mato y'icyuma acukurwa rimwe rimwe kuva hejuru kugeza hasi, kandi buri soko nto y'icyuma ifite igihe cyo gusukura icyuma gishyushya kingana n'umunota umwe.

（1）Gusiga titanium hasi ku gice cyo hasi

Kugira ngo hongerwe uburyo bwo gufatana hagati ya filime na substrate, urwego rwa titaniyumu nziza rukunze gupfukwa mbere yo gusiga titaniyumu nitride. Hindura urwego rw'ingufu kuri 5 × 10-2-3 × 10-1Pa, hindura voltage ya bias ya workpiece kuri 400-500V, kandi uhindure cycle y'ingufu za pulse bias kugeza kuri 40% ~ 50%. Biracyacana amasoko mato ya arc imwe imwe kugira ngo bitange imyanda ikonje. Bitewe n'igabanuka rya voltage ya bias mbi y'igikorwa, ingufu za ioni za titaniyumu ziragabanuka. Nyuma yo kugera ku gice cy'umurimo, ingaruka zo gusuka ziba nke ugereranyije n'ingaruka zo gushyiramo, kandi urwego rw'impinduka za titaniyumu rukorwa ku gice cy'umurimo kugira ngo hongerwe imbaraga zo guhuza hagati y'urwego rwa titaniyumu nitride na substrate. Iyi nzira kandi ni inzira yo gushyushya igice cy'umurimo. Iyo intego ya titaniyumu nziza isohotse, urumuri ruri muri plasma ruba rw'ubururu bw'umweru.

1. Igipfukisho gikomeye cy'ibikombe bifite amoniya

Hindura dogere y'ubusamo kuri 3 × 10^-1-5Pa, hindura voltage ya bias ya workpiece kuri 100-200V, kandi uhindure cycle y'ingufu za pulse bias kugeza kuri 70% ~ 80%. Nyuma y'uko azote ishyizwemo, titaniyumu ni reaction ivanze na plasma isohora arc kugira ngo ishyiremo filime ikomeye ya titanium nitride. Kuri iyi ngingo, urumuri rwa plasma mu cyumba cy'imyanda ni umutuku wa cherry. Niba C₂H₂, O₂, n'ibindi bishyirwa ahagaragara, TiCN, TiO₂, nibindi. Filime zishobora kuboneka.

–Iyi nkuru yasohotse na Guangdong Zhenhua,uruganda rukora imashini zikora imashini zikoresha umwuka ushyushye