Njira Yophikira Ma Arc Source Ion Yaing'ono

Njira yopangira cathodic arc source ion coating ndi yofanana ndi njira zina zopangira, ndipo ntchito zina monga kukhazikitsa zida zogwirira ntchito ndi vacuum cleaner sizibwerezedwanso.

1. Kuyeretsa zida zogwirira ntchito pogwiritsa ntchito mabomba

Asanaphike, mpweya wa argon umalowetsedwa m'chipinda chophikira ndi vacuum ya 2 × 10-2Pa.

Yatsani magetsi a pulse bias, ndi duty cycle ya 20% ndi workpiece bias ya 800-1000V.

Mphamvu ya arc ikayatsidwa, kuwala kozizira kwa arc kumapangidwa, komwe kumatulutsa mphamvu zambiri za ma electron ndi titanium ion kuchokera ku gwero la arc, ndikupanga plasma yochuluka kwambiri. Ion ya titanium imafulumizitsa kulowetsedwa kwake mu workpiece pansi pa mphamvu yoipa ya bias yomwe imagwiritsidwa ntchito pa workpiece, kuphulitsa ndi kutulutsa mpweya wotsala ndi zonyansa zomwe zimayatsidwa pamwamba pa workpiece, ndikuyeretsa ndi kuyeretsa pamwamba pa workpiece; Nthawi yomweyo, mpweya wa chlorine womwe uli mu chipinda chophikira umasinthidwa ndi ma electron, ndipo ma argon ion amafulumizitsa kuphulitsa pamwamba pa workpiece.

Chifukwa chake, zotsatira zoyeretsa bombardment ndi zabwino. Kuyeretsa bombardment kwa mphindi imodzi yokha kumatha kuyeretsa workpiece, yomwe imatchedwa "main arc bombardment". Chifukwa cha kuchuluka kwa ma ioni a titaniyamu, ngati gwero laling'ono la arc ligwiritsidwa ntchito kutsuka ndikutsuka workpiece kwa nthawi yayitali, kutentha kwa workpiece kumatha kutenthedwa kwambiri, ndipo m'mphepete mwa chidacho mutha kukhala wofewa. Pakupanga konsekonse, magwero ang'onoang'ono a arc amatsegulidwa limodzi ndi limodzi kuchokera pamwamba mpaka pansi, ndipo gwero lililonse laling'ono la arc limakhala ndi nthawi yoyeretsa bombardment ya mphindi imodzi.

(1) Wokutira wosanjikiza pansi pa titaniyamu

Pofuna kukonza kugwirizana pakati pa filimu ndi substrate, wosanjikiza wa titanium substrate yoyera nthawi zambiri umakutidwa musanaphike titanium nitride. Sinthani mulingo wa vacuum kukhala 5 × 10-2-3 × 10-1Pa, sinthani voliyumu ya bias ya workpiece kukhala 400-500V, ndikusintha kayendedwe ka ntchito ya pulse bias power supply kufika pa 40% ~ 50%. Kumayatsabe magwero ang'onoang'ono a arc imodzi ndi imodzi kuti apange kutayikira kozizira. Chifukwa cha kuchepa kwa voliyumu ya bias yoyipa ya workpiece, mphamvu ya ma ioni a titanium imachepa. Pambuyo pofika pa workpiece, mphamvu yotulutsa imakhala yochepa kuposa mphamvu yoyika, ndipo wosanjikiza wa titanium transition umapangidwa pa workpiece kuti uwonjezere mphamvu yolumikizira pakati pa wosanjikiza wolimba wa titanium nitride ndi substrate. Njirayi ndi njira yotenthetsera workpiece. Pamene cholinga choyera cha titanium chatulutsidwa, kuwala mu plasma kumakhala kwabuluu.

1. Chophimba cha filimu yolimba ya ammoniated mbale

Sinthani digiri ya vacuum kukhala 3 × 10^-1-5Pa, sinthani voteji ya bias ya workpiece kufika pa 100-200V, ndipo sinthani kayendedwe ka ntchito ya pulse bias power supply kufika pa 70% ~ 80%. Nayitrogeni ikalowetsedwa, titaniyamu ndi combination reaction ndi arc discharge plasma kuti ipange titanium nitride hard film. Pakadali pano, kuwala kwa plasma mu vacuum chamber kumakhala kofiira kwambiri. Ngati C₂H₂, O₂, ndi zina zotero zimayambitsidwa, TiCN, TiO₂, ndi zina zotero. zigawo za filimu zingapezeke.

– Nkhaniyi yatulutsidwa ndi Guangdong Zhenhua,wopanga makina ophikira vacuum