Usoro nke mkpuchi obere isi iyi nke ion

Usoro nke mkpuchi ion nke cathodic arc bụ otu ihe ahụ dị ka teknụzụ mkpuchi ndị ọzọ, ụfọdụ ọrụ dịka itinye ihe ndị a na-arụ ọrụ na ịsacha ihe anaghịzi eme ọzọ.

1. Nhicha bọmbụ nke ihe ndị e ji arụ ọrụ

Tupu e tinye ya n'ime ụlọ mkpuchi ahụ, a na-etinye gas argon n'ime oghere nke 2 × 10-2Pa.

Gbanye ike ọkụ eletrik nke na-egosi nsogbu obi, nke nwere usoro ọrụ nke 20% na usoro ọrụ nke 800-1000V.

Mgbe a gbanyere ike arc, a na-emepụta mwepụta ọkụ arc ubi oyi, nke na-ewepụta nnukwu ọkụ elektrọn na ọkụ titanium ion site na isi iyi arc, na-emepụta plasma dị elu. ion titanium na-eme ka ntinye ya banye na workpiece ngwa ngwa n'okpuru nrụgide dị elu na-adịghị mma nke etinyere na workpiece, na-atụba ma na-agbasa gas na ihe ndị na-emerụ ahụ fọdụrụ n'elu workpiece ahụ, na-ehicha ma na-eme ka elu workpiece ahụ dị ọcha; N'otu oge ahụ, gas chlorine dị n'ime ụlọ mkpuchi ahụ na-aghọ ion site na electrons, ion argon na-emekwa ka bọmbụ nke elu workpiece ahụ dịkwuo ngwa ngwa.

Ya mere, mmetụta nhicha bọmbụ dị mma. Naanị ihe dị ka otu nkeji nke nhicha bọmbụ nwere ike ihicha ihe eji arụ ọrụ, nke a na-akpọ "mbadamba ukwu". N'ihi oke ibu nke ion titanium, ọ bụrụ na ejiri obere isi arc mee ihe iji tụọ ma hichaa ihe eji arụ ọrụ ruo ogologo oge, okpomọkụ nke ihe eji arụ ọrụ ahụ na-adịkarị oke oke, akụkụ ngwaọrụ ahụ nwekwara ike ịdị nro. N'ozuzu mmepụta, a na-agba obere isi arc otu otu site n'elu ruo ala, obere isi arc ọ bụla nwekwara oge nhicha bọmbụ nke ihe dị ka otu nkeji.

(1) Ihe mkpuchi nke titanium dị n'okpuru oyi akwa

Iji melite nrapado dị n'etiti ihe nkiri ahụ na ihe mkpuchi ahụ, a na-ejikarị akwa nke ihe mkpuchi titanium dị ọcha ekpuchi tupu e kpuchie titanium nitride. Gbanwee ọkwa oghere ahụ ka ọ bụrụ 5 × 10-2-3 × 10-1Pa, gbanwee voltaji bias workpiece ka ọ bụrụ 400-500V, ma gbanwee usoro ọrụ nke ike pulse bias ruo 40% ~ 50%. Ka na-agba obere isi mmalite arc ọkụ otu otu iji mepụta mwepụta ubi oyi. N'ihi mbelata na voltaji bias ọjọọ nke ihe mkpuchi ahụ, ike nke ion titanium na-ebelata. Mgbe ọ rutere na ihe mkpuchi ahụ, mmetụta sputtering adịghị obere karịa mmetụta nkwụnye, a na-emepụta oyi akwa mgbanwe titanium na ihe mkpuchi ahụ iji melite ike njikọ dị n'etiti oyi akwa fim siri ike titanium nitride na ihe mkpuchi ahụ. Usoro a bụkwa usoro nke ikpo ọkụ workpiece ahụ. Mgbe a tọhapụrụ ihe mgbaru ọsọ titanium dị ọcha, ìhè dị na plasma na-acha anụnụ anụnụ.

1.Mkpuchi ihe nkiri siri ike nke e ji ammoniated mee

Gbanwee ogo vacuum ka ọ bụrụ 3 × 10^-1-5Pa, gbanwee voltaji bias workpiece ka ọ bụrụ 100-200V, ma gbanwee usoro ọrụ nke ọkọnọ ike bias pulse ruo 70% ~ 80%. Mgbe etinyere nitrogen, titanium bụ mmeghachi omume njikọta na plasma arc discharge iji tinye ihe mkpuchi siri ike titanium nitride. N'oge a, ìhè nke plasma dị na oghere vacuum na-acha uhie uhie. Ọ bụrụ na C₂H₂, O₂, wdg. ka ewebatara, TiCN, TiO2₂, wdg. Enwere ike inweta oyi akwa fim.

– Guangdong Zhenhua, onye dere akụkọ a, wepụtara yaigwe mkpuchi igwe emeputa ihe mkpuchi