Usoro nke Obere Arc Source ion mkpuchi

Usoro nke cathodic arc isi iyi mkpuchi bụ otu ihe ahụ dị ka teknụzụ mkpuchi ndị ọzọ, yana ụfọdụ arụ ọrụ dị ka ịwụnye workpieces na ịchafụ anaghịzi eme ya.

1.Bombardment nhicha nke workpieces

Tupu mkpuchi, a na-ewebata gas argon n'ime ụlọ mkpuchi na oghere nke 2 × 10-2Pa.

Gbanyụọ ọkụ ọkụ nke pulse bias, na-arụ ọrụ okirikiri nke 20% yana nhụsianya workpiece nke 800-1000V.

Mgbe a na-agbanye ike arc, a na-eme ka ọkụ ọkụ na-ekpo ọkụ na-ekpo ọkụ na-ekpo ọkụ, nke na-ebunye nnukwu electron current na titanium ion site na isi iyi arc, na-eme ka plasma dị elu.The titanium ion accelerates ya injection n'ime workpiece n'okpuru ọjọọ elu ele mmadụ anya n'ihu nrụgide etinyere na workpiece, bombarding na sputtering ihe fọdụrụ gas na mmetọ adsorbed n'elu nke workpiece, na ihicha na-asachapụ n'elu nke workpiece;N'otu oge ahụ, chlorine gas na mkpuchi ụlọ bụ ionized site electrons, na argon ions mee ngwa ngwa bombu nke workpiece elu.

Ya mere, mmetụta ihicha bọmbụ dị mma.Naanị ihe dị ka nkeji 1 nke mkpocha bọmbụ nwere ike ihicha ihe arụ ọrụ, nke a na-akpọ "isi bombardment".N'ihi nnukwu ion titanium dị elu, ọ bụrụ na a na-eji obere arc eme ihe iji bombu ma hichaa ọrụ ahụ ruo ogologo oge, okpomọkụ nke workpiece na-adịkarị mfe ikpo ọkụ, na akụkụ ngwá ọrụ nwere ike ịdị nro.Na mmepụta n'ozuzu, a na-agbanye obere arc isi n'otu n'otu site n'elu ruo na ala, na obere arc nke ọ bụla nwere oge nhicha bombu ihe dịka 1 nkeji.

(1) mkpuchi titanium ala oyi akwa

Iji mee ka mmachi dị n'etiti ihe nkiri na mkpụrụ osisi, a na-ekpuchi akwa akwa titanium dị ọcha tupu ikpuchi titanium nitride.Gbanwee oghere larịị ka 5 × 10-2-3 × 10-1Pa, mezie workpiece bias voltaji na 400-500V, na mezie ọrụ okirikiri nke usu ele mmadụ anya n'ihu ike ọkọnọ na 40% ~ 50%.Na-agbanye obere isi mmalite arc n'otu n'otu iji wepụta mkpofu ikuku oyi.N'ihi mbelata nke voltaji na-adịghị mma nke workpiece, ike nke ion titanium na-ebelata.Mgbe eru workpiece, sputtering mmetụta bụ ihe na-erughị deposition mmetụta, na a titanium mgbanwe oyi akwa na-guzobere na workpiece ka mma bonding ike n'etiti titanium nitride ike film oyi akwa na mkpụrụ.Usoro a bụkwa usoro kpo oku workpiece.Mgbe ewepụsịrị ebumnuche titanium dị ọcha, ìhè dị na plasma na-acha anụnụ anụnụ azure.

1.Amoniated nnukwu efere siri ike film mkpuchi

Gbanwee ogo agụụ ka ọ bụrụ 3 × 10^-1-5Pa, mezie voltaji na-adịghị mma na-arụ ọrụ na 100-200V, ma mezie okirikiri ọrụ nke ike ọkọnọ usu ka ọ bụrụ 70% ~ 80%.Mgbe ewebatachara nitrogen, titanium bụ mmeghachi omume nchikota yana plasma na-agbapụta arc iji tinye ihe nkiri siri ike nke titanium nitride.N'ebe a, ìhè nke plasma na oghere oghere bụ cherry red.Ọ bụrụ na C₂H₂, O₂, wdg ewebata, TiCN, TiO₂, wdg enwere ike nweta ihe nkiri ihe nkiri.

– Guangdong Zhenhua weputara akụkọ a, aonye na-emepụta igwe mkpuchi ikuku