He rite tonu te tukanga paninga katote pūtake pewa katote ki ētahi atu hangarau paninga, ā, kāore ētahi mahi pēnei i te tāuta i ngā wāhanga mahi me te tango puehu e whakahokia ana.
1. Te horoi i ngā wahi mahi mā te pupuhi
I mua i te paninga, ka whakaurua te hau ākono ki roto i te rūma paninga me te korehau o 2×10-2Pa.
Whakakāhia te pūtake hiko pāhekoheko, me te huringa mahi o te 20% me te pāhekoheko rauemi mahi o te 800-1000V.
Ina tahuri te mana o te pewa, ka puta he tukunga mārama pewa matao, ka tukuna he nui o te iahiko irahiko me te iahiko katote titanium mai i te pūtake pewa, ka hanga he plasma matotoru. Ka tere ake te werohanga o te katote titanium ki roto i te mea mahi i raro i te pēhanga teitei kino e pā ana ki te mea mahi, ka pupuhi me te pupuhi i te hau me ngā poke toenga e piri ana ki te mata o te mea mahi, ka horoi me te pure i te mata o te mea mahi; I te wa ano, ka whakaionihia te hau chlorine i roto i te ruma paninga e ngā irahiko, ā, ka tere ake te pupuhi o te mata o te mea mahi e ngā katote argon.
Nō reira, he pai te pānga o te horoinga pū. Tata ki te 1 meneti noa iho o te horoinga pū ka taea te horoi i te mea mahi, e kiia nei ko te "pū matua o te pewa". Nā te nui o ngā katote titanium, ki te whakamahia he pūtake pewa iti hei pū me te horoi i te mea mahi mō te wā roa rawa, ka wera rawa te pāmahana o te mea mahi, ā, ka ngawari pea te taha o te taputapu. I roto i te whakaputanga whānui, ka hurihia takitahi ngā pūtake pewa iti mai i runga ki raro, ā, ko te wā horoinga pū o ia pūtake pewa iti he tata ki te 1 meneti.
（1）Te paninga o te paparanga raro o te titanium
Hei whakapai ake i te piri i waenga i te kiriata me te papa, ka pania he paparanga o te papa titanium parakore i mua i te paninga ki te titanium nitride. Whakatikatikahia te taumata korehau ki te 5 × 10-2-3 × 10-1Pa, whakatikatikahia te ngaohiko piro o te mahi ki te 400-500V, ka whakatikatikahia te huringa mahi o te pūhiko piro pulse ki te 40% ~ 50%. Kei te whakakā tonu i ngā pūtake pewa iti takitahi hei whakaputa i te tukunga pewa matao. Nā te hekenga o te ngaohiko piro kino o te mahi, ka heke te kaha o ngā katote titanium. I muri i te taenga ki te mahi, ka iti ake te pānga pupuhi i te pānga whakatakotoranga, ā, ka hangaia he paparanga whakawhiti titanium ki runga i te mahi hei whakapai ake i te kaha here i waenga i te paparanga kiriata mārō titanium nitride me te papa. Ko tēnei tukanga hoki te tukanga whakamahana i te mahi. Ina tukuna te ūnga titanium parakore, ka kikorangi te mārama i roto i te plasma.
1. Paninga kiriata mārō peihana ammoniated
Whakatikatikahia te nekehanga korehau ki te 3×10-1-5Pa, whakatikatikahia te ngaohiko piro o te rauemi mahi ki te 100-200V, ā, whakatikatikahia te huringa mahi o te pūhiko piro pā ki te 70%~80%. Whai muri i te whakaurunga o te hauota, ka tauhohe te titanium me te plasma tukunga arc ki te whakatakoto i te kiriata mārō titanium nitride. I tēnei wā, he whero cherry te mārama o te plasma i roto i te rūma korehau. Mena ko C2H2, Ā2, me ētahi atu, ka whakaurua mai a TiCN, TiO2, me ētahi atu, ka taea te tiki i ngā paparanga kiriata.
–Nā Guangdong Zhenhua tēnei tuhinga i tuku, hekaihanga mīhini paninga korehau
Wā tuku: Pipiri-01-2023