Tsarin shafa ion na cathodic arc source source abu ɗaya ne da sauran fasahar shafa, kuma wasu ayyuka kamar shigar da kayan aiki da kuma yin amfani da injin tsabtace iska ba a sake maimaita su ba.
1. Tsaftace bama-bamai na kayan aiki
Kafin a shafa, ana shigar da iskar argon a cikin ɗakin shafa mai injin tsotsa na 2 × 10-2Pa.
Kunna wutar lantarki mai nuna karfin bugun zuciya, tare da zagayowar aiki na 20% da kuma karfin aiki na 800-1000V.
Idan aka kunna wutar baka, ana samar da wani haske mai sanyi a filin baka, wanda ke fitar da babban adadin wutar lantarki da kuma wutar titanium ion daga tushen baka, wanda ke samar da babban plasma mai yawa. ion din titanium yana hanzarta allurar sa cikin aikin karkashin matsin lamba mai girma da aka sanya wa aikin, yana jefa iskar gas da gurɓatattun abubuwa da ke shake a saman aikin, da kuma tsaftacewa da tsarkake saman aikin; A lokaci guda, iskar chlorine da ke cikin dakin rufewa tana da ion ta hanyar electrons, kuma ions na argon suna hanzarta jefa saman aikin.
Saboda haka, tasirin tsaftace bama-bamai yana da kyau. Kimanin minti 1 na tsaftace bama-bamai zai iya tsaftace aikin, wanda ake kira "bama-bamai na babban baka". Saboda yawan sinadarin titanium ions, idan aka yi amfani da ƙaramin tushen baka don jefa bama-bamai da tsaftace aikin na dogon lokaci, zafin aikin yana iya yin zafi sosai, kuma gefen kayan aiki na iya zama mai laushi. A gabaɗaya, ana kunna ƙananan tushen baka ɗaya bayan ɗaya daga sama zuwa ƙasa, kuma kowane ƙaramin tushen baka yana da lokacin tsaftace bama-bamai na kimanin minti 1.
(1) Rufin ƙasa na titanium mai rufi
Domin inganta mannewa tsakanin fim ɗin da substrate, yawanci ana shafa wani Layer na titanium substrate kafin a shafa titanium nitride. Daidaita matakin injin zuwa 5 × 10-2-3 × 10-1Pa, daidaita ƙarfin wutar lantarki na workpiece bias zuwa 400-500V, kuma daidaita zagayowar aiki na wutar lantarki ta bias pulse bias zuwa 40% ~ 50%. Har yanzu ana kunna ƙananan hanyoyin baka ɗaya bayan ɗaya don samar da fitar da filin sanyi. Saboda raguwar ƙarfin wutar lantarki mara kyau na workpiece, kuzarin ions na titanium yana raguwa. Bayan isa ga workpiece, tasirin sputtering ya ƙasa da tasirin ajiya, kuma ana samar da Layer na sauyawa na titanium akan workpiece don inganta ƙarfin haɗin gwiwa tsakanin Layer ɗin fim mai tauri na titanium nitride da substrate. Wannan tsari kuma shine tsarin dumama workpiece. Lokacin da aka fitar da maƙasudin titanium mai tsabta, hasken da ke cikin plasma yana da shuɗi mai haske.
1. Rufin fim mai tauri na kwano mai ammoniya
Daidaita matakin injin zuwa 3 × 10-1-5Pa, daidaita ƙarfin wutar lantarki na workpiece bias zuwa 100-200V, sannan a daidaita zagayowar aiki na wutar lantarki ta bias pulse bias zuwa 70% ~ 80%. Bayan an shigar da nitrogen, titanium yana haɗuwa da plasma mai fitarwa don saka fim ɗin titanium nitride mai tauri. A wannan lokacin, hasken plasma a cikin ɗakin injin yana ja. Idan C2H2, O2da sauransu, an gabatar da TiCN, TiO22, da sauransu. Ana iya samun layukan fim.
– An fitar da wannan labarin ne daga Guangdong Zhenhua, waniinjin shafa injin injin
Lokacin Saƙo: Yuni-01-2023