I-HFCVD0606

Igumbi lokumboza i-vacuum lemishini yokufaka umusi wamakhemikhali lisebenzisa isakhiwo esizimele sokupholisa amanzi esinezingqimba ezimbili, esisebenza kahle futhi esifanayo ekupholiseni, futhi sinesakhiwo esiphephile nesizinzile. Imishini yakhelwe ngeminyango emibili, amafasitela amaningi okubuka kanye nezixhumi eziningi zokunweba, okulula ukuxhumana kwangaphandle kwezinto ezihambisanayo njengokulinganisa izinga lokushisa kwe-infrared, ukuhlaziywa kwe-spectral, ukuqapha ividiyo kanye ne-thermocouple. Umqondo wokuklama othuthukisiwe wenza ukulungiswa kwansuku zonke nokugcinwa, ukushintsha kokucushwa kanye nokuthuthukiswa kwemishini kube lula futhi kube lula, futhi kunciphisa ngempumelelo izindleko zokusebenzisa nokuthuthukisa.

Izici zemishini:

1. Izingxenye zokwehla kwamandla emali zemishini zifaka phakathi imitha yokugeleza kwesisindo, i-solenoid valve kanye nethangi lokuxuba igesi, okuqinisekisa ukulawulwa okunembile kokugeleza kwegesi yenqubo, ukuxuba okufanayo kanye nokuhlukaniswa okuphephile kwamagesi ahlukene, futhi kungakhetha izingxenye zesistimu yegesi zokusetshenziswa komthombo wegesi owuketshezi, kwenze kube lula ukukhethwa komuntu siqu kwemithombo ehlukahlukene yekhabhoni yoketshezi, kanye nokusetshenziswa okuphephile kwemithombo yedayimane eqhubayo kanye ne-electrode liquid boron.
2. Inhlangano yokukhipha umoya ifakwe ipompo yokuvamisa ene-rotary vane vacuum ethule futhi esebenza kahle kanye nohlelo lwepompo ye-turbo molecular engahlangabezana ngokushesha nendawo yangemuva ye-vacuum ephezulu. Igeyiji ye-vacuum ehlanganisiwe enegeyiji yokumelana kanye negeyiji ye-ionization isetshenziselwa ukulinganisa i-vacuum, kanye nohlelo lwe-capacitive film gauge olungalinganisa ukucindezela kwamagesi enqubo ahlukene ebangeni elibanzi. Ukucindezela kokufakwa kulawulwa ngokuzenzakalelayo ngokuphelele yi-valve yokulawula elinganiselayo enembile kakhulu.
3. Ingxenye yamanzi okupholisa ifakwe ukucindezela kwamanzi okuneziteshi eziningi, ukugeleza, ukulinganisa izinga lokushisa kanye nokuqapha okuzenzakalelayo kwesofthiwe. Izingxenye ezahlukene zokupholisa azizimele, okuyinto elula ukuxilongwa kwamaphutha ngokushesha. Wonke amagatsha anezinkinobho zamavalvu ezizimele, eziphephile futhi ezisebenzayo.
4. Izingxenye zokulawula zikagesi zisebenzisa isikrini se-LCD esinobukhulu obukhulu bomuntu nomshini futhi zibambisana nokulawula okuzenzakalelayo kwe-PLC ukuze kube lula ukuhlela nokungenisa ifomula yenqubo. Ijika elinemifanekiso libonisa ngokubonakalayo izinguquko namanani amapharamitha ahlukahlukene, kanti amapharamitha emishini nenqubo aqoshwa ngokuzenzakalelayo futhi agcinwe ukuze kube lula ukulandelela izinkinga kanye nokuhlaziywa kwezibalo zedatha.
5. I-rack yezinto zokusebenza ifakwe injini ye-servo ukulawula ukuphakamisa nokwehlisa itafula le-substrate. Itafula le-substrate le-graphite noma lethusi elibomvu lingakhethwa. Izinga lokushisa lilinganiswa yi-thermocouple.
6. Izingxenye ze-rack zingaklanywa zizonke noma ngokwehlukana ngokwezidingo zamakhasimende ukuze kuhlangatshezwane nezidingo ezikhethekile zokuphatha zamakhasimende.
7. Izingxenye zepuleti lokuvala zinhle futhi zinhle. Amapuleti okuvala ezindaweni ezahlukene zemodyuli ezisebenzayo zemishini angahlukaniswa ngokushesha noma avulwe futhi avalwe ngokuzimela, okuyinto elula kakhulu ukuyisebenzisa.

Imishini ye-CVD ye-filament eshisayo ifanelekela ukufaka izinto zedayimane, okuhlanganisa ukugqoka ifilimu encane, ifilimu ejiyile ezisekelayo, idayimane elincane elicwebezelayo nelicwebezelayo, idayimane eliqhubayo, njll. Isetshenziswa kakhulu ekugqokeni okuvikelayo kwamathuluzi okusika i-carbide aqinisiwe, izinto ze-semiconductor ezifana ne-silicon ne-silicon carbide, ukugqoka kokushisa kwamadivayisi, i-electrode yedayimane eqhubayo ene-boron doped, ukubulala amagciwane nge-ozone emanzini e-electrolytic noma ukwelashwa kwendle.