HFCVD0606

Kamuri rekuputira vacuum remuchina we chemical vapor deposition rinoshandisa chimiro chakazvimirira chekutonhodza mvura chine mativi maviri, chinoshanda zvakanaka uye chakafanana pakutonhodza, uye chine chimiro chakachengeteka uye chakasimba. Muchina uyu wakagadzirwa nemasuo maviri, mahwindo akawanda ekutarisa uye nzvimbo dzakawanda dzekuwedzera, izvo zviri nyore kubatanidza kunze kwezvinhu zvinobatsira zvakaita sekuyera tembiricha ye infrared, kuongorora spectral, kutarisa mavhidhiyo uye thermocouple. Pfungwa yekugadzira yepamusoro inoita kuti kugadziriswa kwezuva nezuva nekugadzirisa, kushandura magadzirirwo uye kusimudzira michina kuve nyore uye kushoma, uye zvinobudirira kuderedza mari yekushandisa nekusimudzira.

Zvishandiso:

1. Zvikamu zve inflation zvemidziyo zvinosanganisira mass flow meter, solenoid valve uye gas mixing tank, izvo zvinovimbisa kudzora kwakarurama kwe process gas flow, kusanganisa kwakafanana uye kupatsanurwa kwakachengeteka kwemagasi akasiyana, uye zvinogona kusarudza zvikamu zvegasi system yekushandisa liquid gas source, zvichiita kuti sarudzo yemhando dzakasiyana dze liquid carbon sources ienderane neyako, uye kushandiswa kwakachengeteka kwe synthetic conductive diamond and electrode liquid boron sources.
2. Musangano wekuburitsa mweya une pombi ye vacuum inotenderera isina ruzha uye inoshanda zvakanaka pamwe ne turbo molecular pump system inogona kusangana nekukurumidza nenzvimbo yepamusoro ye vacuum. Composite vacuum gauge ine resistance gauge uye ionization gauge inoshandiswa pakuyera vacuum, pamwe ne capacitive film gauge system inogona kuyera kumanikidzwa kwemagasi akasiyana-siyana akasiyana-siyana. Kumanikidzwa kwekuisa mweya kunodzorwa otomatiki ne high-precision proportional control valve.
3. Chikamu chemvura inotonhodza chine nzira dzakawanda dzekutarisa kumanikidzwa kwemvura, kuyerera kwayo, kuyerwa kwetembiricha uye software otomatiki. Zvikamu zvakasiyana zvekutonhodza hazvibatanidzwi, izvo zviri nyore kuongororwa nekukurumidza. Matavi ese ane mavharuvhu akazvimiririra, ayo akachengeteka uye anoshanda zvakanaka.
4. Zvikamu zvemagetsi zvinoshandisa LCD screen yakakura uye zvinoshanda pamwe chete nePLC full-otomatiki control kuti zvive nyore kugadzirisa nekutumira fomura yemaitiro. Graphical curve inoratidza shanduko nemitengo yezvikamu zvakasiyana-siyana, uye michina nematanho emaitiro zvinorekodhwa otomatiki uye zvinochengetwa kuti zvive nyore kutevedzera matambudziko uye kuongorora data.
5. Raki ye workpiece ine servo motor yekudzora kusimudza nekudzika kwetafura ye substrate. Tafura ye graphite kana tsvuku ye copper substrate inogona kusarudzwa. Tembiricha inoyerwa ne thermocouple.
6. Zvikamu zveraki zvinogona kugadzirwa zvese kana zvakasiyana zvichienderana nezvinodiwa nevatengi kuti zvisangane nezvinodiwa zvekutarisira zvakakosha zvevatengi.
7. Zvikamu zveplate yekuvharira zvakanaka uye zvinoyevedza. Maplate ekuvharira munzvimbo dzakasiyana dzemamodule anoshanda emidziyo anogona kukurumidza kupatsanurwa kana kuvhurwa nekuvharwa ega, izvo zviri nyore kushandisa.

Midziyo yeCVD inopisa ine filament yakakodzera kuiswa kwezvinhu zvedhaimani, zvinosanganisira jira rakatetepa, jira rakakora rinozvitsigira, dhaimani re microcrystalline ne nanocrystalline, dhaimani rinofambisa mvura, nezvimwewo. Inonyanya kushandiswa pakudzivirira kupfeka kwezvishandiso zvekucheka carbide zvakasimwa, zvinhu zve semiconductor zvakaita sesilicon nesilicon carbide, jira rinopisa kupisa, electrode yedhaimani ine boron doped, ozone disinfection yemvura ye electrolytic kana kurapa tsvina.