HFCVD0606

Icyumba cyo gusiga ifu y'ibikoresho byo gushyiramo umwuka wa shimi gikoresha imiterere yigenga yo gukonjesha amazi ifite urwego rubiri, ikora neza kandi ihuye mu gukonjesha, kandi ifite imiterere yizewe kandi ihamye. Ibi bikoresho byakozwe bifite inzugi ebyiri, amadirishya menshi yo kureba hamwe n'ahantu henshi ho kwagura, byoroshye guhuza inyuma y'ibikoresho by'inyongera nko gupima ubushyuhe bwa infrared, gusesengura spectral, gukurikirana amashusho na thermocouple. Igitekerezo cy'igishushanyo kigezweho gituma ivugurura rya buri munsi n'isukura, guhindura imiterere no kuvugurura ibikoresho byoroshye kandi byoroshye, kandi bigabanya neza ikiguzi cyo kubikoresha no kuvugurura.

Ibiranga ibikoresho:

1. Ibice by'ingufu by'ibikoresho birimo ahanini igipimo cy'amazi menshi, valve ya solenoid na tanki yo kuvanga gazi, bigenzura neza uburyo gazi itembera neza, kuvanga neza no gushyira mu buryo bwizewe gazi zitandukanye, kandi bishobora guhitamo ibice by'umwuka wo gukoresha gazi yo mu mazi, koroshya guhitamo ubwoko butandukanye bw'amazi ya karuboni, no gukoresha neza diyama na electrode liquid boron.
2. Iteraniro ryo gukuramo umwuka rifite pompe ikora neza kandi idatuje kandi ikora neza hamwe na sisitemu ya turbo molecular pump ishobora guhura vuba n’ibidukikije byo hejuru bya vacuum background. Igipimo cya vacuum gikozwe muri composite gifite resistance gauge na ionization gauge gikoreshwa mu gupima vacuum, ndetse na sisitemu ya capacitive film gauge ishobora gupima umuvuduko w’imyuka itandukanye mu buryo butandukanye. Umuvuduko wo gushyiramo umwuka ugenzurwa byikora na valve igenzura neza.
3. Igice cy'amazi akonjesha gifite umuvuduko w'amazi ukoresha imiyoboro myinshi, amazi atembera, ubushyuhe n'uburyo bwo kugenzura byikora. Ibice bitandukanye bikonjesha ntibihuza, ibyo bikaba byoroshye gusuzuma amakosa vuba. Amashami yose afite uburyo bwo gusimbuza valve, bufite umutekano kandi bukora neza.
4. Ibice bigenzura amashanyarazi bifata ecran nini ya LCD ihuza igikoresho cy’umuntu n’imashini kandi bigakorana na PLC igenzura ryikora ryihuse kugira ngo byorohereze gutunganya no kwinjiza formula y’imikorere. Ishusho yerekana impinduka n’agaciro k’ibipimo bitandukanye, kandi ibipimo by’ibikoresho n’imikorere bifatwa mu buryo bwikora kandi bigashyirwa mu bubiko kugira ngo byorohereze gukurikirana ibibazo no gusesengura imibare y’amakuru.
5. Agakoresho ko gukora gafite moteri ya servo kugira ngo igenzure guterura no kumanura ameza ya substrate. Imeza ya grafiti cyangwa iy'umuringa utukura irashobora gutoranywa. Ubushyuhe bupimirwa na thermocouple.
6. Ibice by'urukiramende bishobora gutegurwa byose cyangwa ukwabyo hakurikijwe ibyo abakiriya bakeneye kugira ngo bihuze n'ibyo abakiriya bakeneye mu buryo bwihariye.
7. Ibice by'icyuma gifunga ni byiza kandi biranga ubwiza. Igikoresho gifunga kiri mu bice bitandukanye by'imikorere y'ibikoresho gishobora gusenywa vuba cyangwa gufungurwa no gufungwa ukwacyo, ibyo bikaba byoroshye cyane kubikoresha.

Ibikoresho bya CVD bishyushye bikwiranye no gushyiramo ibikoresho bya diyama, harimo irangi ryoroheje, irangi ryinshi ryishingikirizaho, irangi rya microcrystalline na nanocrystalline, irangi ritwara imizigo, nibindi. Bikoreshwa cyane cyane mu gukingira ibikoresho byo gukata karubide ikoresheje sima, ibikoresho bya semiconductor nka silicon na silicon carbide, irangi ritwara amazi mu buryo bushyushye, irangi rya diyama ritwara imizigo rya boron, irangi rya ozone mu mazi akoresha amashanyarazi cyangwa irangi ry’amazi mabi.