HFCVD0606

Chipinda chophikira vacuum cha chipangizo chosungira nthunzi ya mankhwala chimagwiritsa ntchito kapangidwe kodziyimira pawokha koziziritsira madzi ka magawo awiri, komwe ndi kogwira ntchito bwino komanso kofanana pakuziziritsa, ndipo kali ndi kapangidwe kotetezeka komanso kokhazikika. Zipangizozi zimapangidwa ndi zitseko ziwiri, mawindo ambiri owonera komanso mawonekedwe ambiri okulitsa, zomwe ndizosavuta kulumikizana ndi zida zina monga kuyeza kutentha kwa infrared, kusanthula kwa spectral, kuyang'anira makanema ndi thermocouple. Lingaliro lapamwamba la kapangidwe kameneka limapangitsa kukonzanso ndi kukonza tsiku ndi tsiku, kusintha kwa kasinthidwe ndi kukweza zidazo kukhala kosavuta komanso kophweka, ndipo kumachepetsa bwino ndalama zogwiritsira ntchito ndi kukweza.

Zida:

1. Zigawo za inflation za zidazi zimaphatikizapo mita yoyezera kuchuluka kwa mpweya, valavu ya solenoid ndi thanki yosakaniza mpweya, zomwe zimaonetsetsa kuti mpweya ukuyenda bwino, kusakaniza kofanana komanso kusiyanitsa mpweya wosiyanasiyana, ndipo zimatha kusankha zigawo za mpweya kuti zigwiritsidwe ntchito ndi gwero la mpweya wamadzimadzi, zimathandiza kusankha mitundu yosiyanasiyana ya magwero a kaboni wamadzimadzi, komanso kugwiritsa ntchito bwino magwero a diamondi ndi ma electrode amadzimadzi a boron.
2. Chogwirira ntchito chotulutsa mpweya chili ndi chopopera mpweya chozungulira chopanda phokoso komanso chogwira ntchito bwino komanso makina opopera mpweya otchedwa turbo molecular pump omwe amatha kukumana ndi malo okhala ndi vacuum yambiri. Chopopera mpweya chophatikizana chokhala ndi resistance gauge ndi ionization gauge chimagwiritsidwa ntchito poyezera vacuum, komanso makina oyezera mpweya omwe amatha kuyeza kuthamanga kwa mpweya wosiyanasiyana m'njira zosiyanasiyana. Kuthamanga kwa mpweya kumayendetsedwa ndi valavu yowongolera yolondola kwambiri.
3. Chigawo cha madzi ozizira chili ndi mphamvu ya madzi ya njira zambiri, kuyenda kwa madzi, kuyeza kutentha ndi mapulogalamu owunikira okha. Zigawo zosiyanasiyana zoziziritsira sizimasiyana, zomwe zimathandiza kuzindikira zolakwika mwachangu. Nthambi zonse zimakhala ndi ma switch odziyimira pawokha a ma valvu, omwe ndi otetezeka komanso ogwira ntchito bwino.
4. Zigawo zowongolera zamagetsi zimagwiritsa ntchito chophimba chachikulu cha LCD cholumikizirana ndi makina a munthu ndipo zimagwirizana ndi PLC yowongolera yokha kuti zithandizire kusintha ndi kulowetsa njira yogwirira ntchito. Mzere wozungulira umawonetsa kusintha ndi mtengo wa magawo osiyanasiyana, ndipo zida ndi magawo a njira zimalembedwa zokha ndikusungidwa kuti zithandizire kutsata mavuto ndi kusanthula deta.
5. Chogwirira ntchito chili ndi injini ya servo kuti ilamulire kukweza ndi kutsitsa tebulo la substrate. Tebulo la grafiti kapena la mkuwa wofiira likhoza kusankhidwa. Kutentha kumayesedwa ndi thermocouple.
6. Zigawo za rack zitha kupangidwa zonse kapena padera malinga ndi zosowa za makasitomala kuti zikwaniritse zofunikira zapadera zogwirira ntchito za makasitomala.
7. Zigawo za mbale yotsekera ndi zokongola komanso zokongola. Ma mbale otsekera m'malo osiyanasiyana ogwira ntchito a zida amatha kuswedwa mwachangu kapena kutsegulidwa ndikutsekedwa paokha, zomwe ndizosavuta kugwiritsa ntchito.

Zipangizo za CVD zotentha ndizoyenera kuyikamo zinthu za diamondi, kuphatikizapo zokutira filimu yopyapyala, filimu yokhuthala yodziyimira yokha, diamondi ya microcrystalline ndi nanocrystalline, diamondi yoyendetsa, ndi zina zotero. Zimagwiritsidwa ntchito makamaka popangira zida zodulira carbide zomangidwa ndi simenti, zinthu za semiconductor monga silicon ndi silicon carbide, zokutira kutentha kwa zipangizo, electrode ya diamondi yoyendetsa boron, kupha madzi a electrolytic ndi ozone kapena kuyeretsa zimbudzi.