Uma kuqhathaniswa nezinye ubuchwepheshe bokumboza, ukumboza okune-sputtering kunezici ezilandelayo ezibalulekile: amapharamitha okusebenza anobubanzi obukhulu bokulungiswa okuguquguqukayo, isivinini sokufakwa kokumboza kanye nobukhulu (isimo sendawo yokumboza) kulula ukulawula, futhi akukho mingcele yokuklama ku-geometry yethagethi yokumboza ukuqinisekisa ukufana kokumboza; Isendlalelo sefilimu asinayo inkinga yezinhlayiya zamaconsi: cishe zonke izinsimbi, ama-alloy nezinto zobumba zingenziwa zibe izinto eziqondiwe; Ngokumpoza kwe-DC noma kwe-RF, ukumboza kwensimbi emsulwa noma i-alloy okunezilinganiso eziqondile nezihlala njalo namafilimu okusabela kwensimbi anokuhlanganyela kwegesi kungakhiqizwa ukuze kuhlangatshezwane nezidingo ezahlukahlukene nezinembile zamafilimu. Amapharamitha enqubo ejwayelekile yokumboza okune-sputtering yilezi: ingcindezi yokusebenza ingu-01Pa; I-voltage eqondiwe ingu-300~700V, kanti ubuningi bamandla okuqondiwe bungu-1~36W/cm2. Izici ezithile zokumpoza yilezi:
(1) Izinga eliphezulu lokufakwa. Ngenxa yokusetshenziswa kwama-electrode, kungatholakala imisinga emikhulu kakhulu ye-ion yokubhomba okuqondiwe, ngakho-ke izinga lokubhoboza okukhafulayo ebusweni obuqondiwe kanye nezinga lokufakwa kwefilimu ebusweni be-substrate liphezulu.
(2) Ukusebenza kahle kwamandla aphezulu. Amathuba okungqubuzana phakathi kwama-electron anamandla aphansi nama-athomu egesi aphezulu, ngakho-ke izinga le-ionization yegesi likhuphuka kakhulu. Ngokufanayo, ukuvimba kwegesi ekhishwayo (noma i-plasma) kuncishisiwe kakhulu. Ngakho-ke, uma kuqhathaniswa nokuphalaza kwe-DC okunama-pole amabili, noma ngabe ingcindezi yokusebenza incishisiwe kusuka ku-1~10Pa kuya ku-10-2~10-1Pa, i-voltage yokuphalaza incishisiwe kusuka ku-volts eyizinkulungwane eziningana kuya ku-volts engamakhulu, futhi ukusebenza kahle kokuphalaza kanye nezinga lokufakwa kuyanda ngama-oda amakhulu.
(3) Ukuphalaza kwamandla aphansi. Ngenxa ye-voltage ephansi ye-cathode esetshenziswa ekuhlosweni, i-plasma iboshelwa esikhaleni esiseduze ne-cathode yinsimu yamagnetic, evimbela ukwanda kwezinhlayiya ezishajelwe amandla aphezulu ohlangothini lwe-substrate. Ngakho-ke, izinga lomonakalo obangelwa ukuqhunyiswa kwezinhlayiya ezishajelwe kuma-substrate afana namadivayisi e-semiconductor liphansi kunezinye izindlela zokuphalaza.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua.
Isikhathi sokuthunyelwe: Septhemba-08-2023