Piv nrog rau lwm cov txheej txheem txheej, sputtering txheej muaj cov yam ntxwv tseem ceeb hauv qab no: cov kev ua haujlwm muaj qhov loj dynamic hloov kho ntau yam, qhov ceev ntawm cov txheej thiab tuab (lub xeev ntawm thaj chaw txheej) yooj yim tswj, thiab tsis muaj kev txwv tsim rau ntawm geometry ntawm lub hom phiaj sputtering kom ntseeg tau tias qhov sib xws ntawm cov txheej; Cov txheej zaj duab xis tsis muaj teeb meem ntawm cov khoom me me: yuav luag txhua cov hlau, cov hlau sib xyaw thiab cov khoom siv ceramic tuaj yeem ua rau cov khoom siv hom phiaj; Los ntawm DC lossis RF sputtering, cov hlau ntshiab lossis cov hlau sib xyaw nrog cov feem pua thiab tas li thiab cov yeeb yaj kiab hlau nrog kev koom tes roj tuaj yeem tsim kom tau raws li ntau yam thiab siab-precision xav tau ntawm cov yeeb yaj kiab. Cov txheej txheem txheej txheem ntawm sputtering txheej yog: lub siab ua haujlwm yog 01Pa; Lub hom phiaj voltage yog 300 ~ 700V, thiab lub hom phiaj lub zog ceev yog 1 ~ 36W / cm2. Cov yam ntxwv tshwj xeeb ntawm sputtering yog:
(1) Tus nqi tso tawm siab. Vim yog siv cov electrodes, cov ion currents loj heev tuaj yeem tau txais, yog li tus nqi sputtering etching ntawm qhov chaw ntawm lub hom phiaj thiab tus nqi tso zaj duab xis ntawm qhov chaw substrate siab.
(2) Kev siv hluav taws xob zoo heev. Qhov feem pua ntawm kev sib tsoo ntawm cov electrons uas tsis muaj zog thiab cov roj atoms siab heev, yog li ntawd cov roj ionization tus nqi nce siab heev. Raws li qhov sib xws, qhov impedance ntawm cov roj tawm (lossis plasma) raug txo qis heev. Yog li ntawd, piv nrog DC ob-ncej sputtering, txawm tias qhov siab ua haujlwm raug txo los ntawm 1 ~ 10Pa mus rau 10-2 ~ 10-1Pa, qhov hluav taws xob sputtering raug txo los ntawm ntau txhiab volts mus rau ntau pua volts, thiab qhov ua tau zoo sputtering thiab tus nqi tso tawm nce ntxiv los ntawm kev txiav txim ntawm qhov loj me.
(3) Kev tawg hluav taws xob tsawg. Vim yog qhov hluav taws xob cathode qis siv rau lub hom phiaj, cov plasma raug khi rau hauv qhov chaw ze ntawm cathode los ntawm lub zog sib nqus, uas tiv thaiv qhov tshwm sim ntawm cov khoom me me uas muaj zog siab mus rau sab ntawm lub substrate. Yog li ntawd, qib kev puas tsuaj los ntawm kev tawg hluav taws xob ntawm cov khoom me me rau cov substrates xws li cov khoom siv semiconductor qis dua li lwm txoj kev tawg hluav taws xob.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua.
Lub sijhawm tshaj tawm: Cuaj hlis-08-2023