Siffofin shafi na magnetron sputtering babi na 1

Idan aka kwatanta da sauran fasahohin rufi, rufin sputtering yana da waɗannan muhimman siffofi: sigogin aiki suna da babban kewayon daidaitawa mai ƙarfi, saurin ajiyar rufi da kauri (yanayin yankin rufi) suna da sauƙin sarrafawa, kuma babu ƙuntatawa kan ƙira akan yanayin maƙasudin sputtering don tabbatar da daidaiton murfin; Layer ɗin fim ɗin ba shi da matsalar barbashi masu ɗigon ruwa: kusan dukkan ƙarfe, gami da kayan yumbu za a iya yin su kayan da aka nufa; Ta hanyar sputtering na DC ko RF, rufin ƙarfe mai tsarki ko ƙarfe mai kauri tare da daidaito da daidaito kuma ana iya samar da fina-finan amsawar ƙarfe tare da haɗin gas don biyan buƙatun daban-daban da daidaito na fina-finai. Sigogi na tsari na sputtering sune: matsin aiki shine 01Pa; Ƙarfin wutar lantarki mai manufa shine 300~700V, kuma yawan ƙarfin manufa shine 1~36W/cm2. Takamaiman halayen sputtering sune:

(1) Yawan ajiyar bayanai mai yawa. Saboda amfani da na'urorin lantarki, ana iya samun manyan kwararar ion masu fashewa da aka yi niyya, don haka yawan fitar da bayanai daga saman da aka yi niyya da kuma yawan ajiyar bayanai daga saman da aka yi niyya suna da yawa.

(2) Ingantaccen ƙarfin lantarki. Yiwuwar karo tsakanin ƙananan electrons da atoms na iskar gas yana da yawa, don haka ƙimar ionization na iskar gas yana ƙaruwa sosai. Haka kuma, juriyar iskar gas mai fitarwa (ko plasma) ta ragu sosai. Saboda haka, idan aka kwatanta da sputtering na DC mai sanduna biyu, koda kuwa an rage matsin lamba na aiki daga 1~10Pa zuwa 10-2~10-1Pa, ƙarfin sputtering yana raguwa daga dubban volts zuwa ɗaruruwan volts, kuma ingancin sputtering da ƙimar ajiya suna ƙaruwa ta hanyar umarni na girma.

(3) Ƙarfin fitar da iska mai ƙarancin kuzari. Saboda ƙarancin ƙarfin cathode da aka yi amfani da shi a kan abin da aka nufa, ana ɗaure plasma a sararin da ke kusa da cathode ta hanyar filin maganadisu, wanda ke hana faruwar ƙwayoyin da aka caji masu ƙarfi a gefen substrate. Saboda haka, matakin lalacewar da fashewar ƙwayoyin da aka caji ke haifarwa ga substrates kamar na'urorin semiconductor ya yi ƙasa da na sauran hanyoyin fitar da iska.

– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua.