Zvichienzaniswa nedzimwe nzira dzekuputira, jira rekuputira rine zvinhu zvinotevera zvakakosha: ma parameter ekushanda ane dynamic adjustment range yakakura, coating deposition speed uye thickness (mamiriro enzvimbo yekuputira) zviri nyore kudzora, uye hapana zvirambidzo zvekugadzira pa geometry ye sputtering target kuti ive nechokwadi chekuti jira racho rakafanana; Firimu remuchina harina dambudziko remadonhwe emvura: dzinenge simbi dzese, alloys uye ceramic materials zvinogona kugadzirwa kuita zvinhu zvinotarwa; Ne DC kana RF sputtering, simbi yakachena kana alloy coatings ine quarantine uye constant proportions uye metal reaction films ine gas participation inogona kugadzirwa kuti isangane nezvinodiwa zvakasiyana-siyana uye zvakanyatsonaka zvemafirimu. Ma process parameters e sputtering coatings ndeaya: working pressure is 01Pa; Target voltage is 300~700V, uye target power density is 1~36W/cm2. Hunhu hwe sputtering ndeaya:
(1) Kuwanda kwekuisa zvinhu. Nekuda kwekushandiswa kwemaelectrode, ma ion currents makuru kwazvo anogona kuwanikwa, saka mwero wekupinza zvinhu panzvimbo yakatarwa uye mwero wekuisa zvinhu panzvimbo yesubstrate wakakwira.
(2) Kushanda nesimba kwakanyanya. Mikana yekusangana pakati pemaerekitironi ane simba shoma nemaatomu egasi yakakwira, saka chiyero cheionization yegasi chakawedzera zvakanyanya. Saizvozvo, kupindirana kwegasi rinobuda (kana plasma) kwakaderera zvikuru. Saka, kana tichienzanisa neDC two-pole sputtering, kunyangwe kana kushanda kwacho kwadzikira kubva pa1~10Pa kusvika pa10-2~10-1Pa, voltage yekusputtering yadzikira kubva pazviuru zvakati wandei zvevolts kusvika kumazana evolts, uye kushanda kwesputtering uye chiyero chekuisa simba kwakawedzera nehukuru.
(3) Kupupira kusina simba rakawanda. Nekuda kwemagetsi mashoma e cathode anoshandiswa pachinangwa, plasma inosungirirwa munzvimbo iri pedyo ne cathode nesimba remagineti, izvo zvinodzivisa kuwanda kwezvikamu zvine simba rakawanda kudivi re substrate. Nokudaro, mwero wekukuvadzwa kunokonzerwa nekuputirwa kwezvikamu zvine simba rakawanda kuzvikamu zvakaita semidziyo ye semiconductor wakaderera pane weimwe nzira dzepupira.
–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua.
Nguva yekutumira: Gunyana-08-2023