Atụmatụ nke mkpuchi magnetron sputtering isi nke 1

Ma e jiri ya tụnyere teknụzụ mkpuchi ndị ọzọ, mkpuchi sputtering nwere ihe ndị a dị mkpa: paramita ọrụ nwere oke mgbanwe dị ukwuu, ọsọ na ọkpụrụkpụ nke mkpuchi mkpuchi (ọnọdụ mpaghara mkpuchi) dị mfe ijikwa, enweghịkwa mmachi imewe na geometry nke ihe mgbaru ọsọ sputtering iji hụ na mkpuchi ahụ dị n'otu; Okpokoro ihe nkiri ahụ enweghị nsogbu nke ihe ntapu mmiri: enwere ike ime ihe fọrọ nke nta ka ọ bụrụ ọla niile, alloys na ihe seramiiki ka ọ bụrụ ihe ebumnuche; Site na DC ma ọ bụ RF sputtering, mkpuchi metal dị ọcha ma ọ bụ alloy nwere oke ziri ezi na nke na-adịgide adịgide na enwere ike ịmepụta ihe nkiri mmeghachi omume metal nwere isonye na gas iji mezuo ihe dị iche iche na nke ziri ezi nke ihe nkiri. Paramita usoro a na-ahụkarị nke mkpuchi sputtering bụ: nrụgide ọrụ bụ 01Pa; Voltaji ebumnuche bụ 300~700V, na njupụta ike ebumnuche bụ 1~36W/cm2. Njirimara kpọmkwem nke sputtering bụ:

(1) Oke ọnụego nchekwa. N'ihi ojiji nke elektrọd, enwere ike nweta nnukwu ọkụ ion bọmbụ ebumnuche, yabụ ọnụego mgbawa na elu ebumnuche na ọnụego itinye ihe nkiri na elu substrate dị elu.

(2) Ike dị elu. Ohere nke nkpọkọ n'etiti elektrọn ndị na-adịghị ike na atọm gas dị elu, yabụ ọnụego ionization gas na-abawanye nke ukwuu. N'otu aka ahụ, a na-ebelata mgbochi nke gas mwepụta (ma ọ bụ plasma) nke ukwuu. Ya mere, ma e jiri ya tụnyere DC-pole sputtering, ọbụlagodi na nrụgide ọrụ ebelata site na 1~10Pa ruo 10-2~10-1Pa, a na-ebelata voltaji sputtering site na ọtụtụ puku volts ruo ọtụtụ narị volts, arụmọrụ sputtering na ọnụego nkwụnye ego na-abawanye site na usoro nke oke.

(3) Ịgbasa obere ike. N'ihi obere voltaji kathode etinyere na ihe a na-achọ, a na-ejikọ plasma ahụ n'ime oghere dị nso na kathode site na ebe ndọta, nke na-egbochi ohere nke obere ihe ndị a na-agbaze n'ike dị elu n'akụkụ ihe ahụ. Ya mere, oke mmebi nke bọmbụ nke obere ihe ndị a na-agbaze n'elu ihe ndị dị ka ngwaọrụ semiconductor dị ala karịa nke ụzọ ndị ọzọ a na-agbapụta.

–E bipụtara akụkọ a site n'aka onyeigwe mkpuchi igwe emeputa ihe mkpuchiGuangdong Zhenhua.