Ibiranga magnetron sputtering coating igice cya 1

Ugereranyije n'izindi koranabuhanga zo gusiga, gusiga irangi ry'amazi rifite ibi bikurikira by'ingenzi: ibipimo bikora bifite urwego runini rwo guhindura ibintu, umuvuduko n'ubugari bw'irangi (imiterere y'agace gasiga irangi) biroroshye kugenzura, kandi nta mbogamizi zihari ku miterere y'icyerekezo cyo gusiga irangi kugira ngo harebwe ko irangi rihuye; Urusobe rwa filime ntabwo rufite ikibazo cy'uduce duto: hafi ya byose byuma, aloyi n'ibikoresho bya ceramic bishobora gukorwamo ibikoresho by'ingenzi; Binyuze mu gusiga irangi rya DC cyangwa RF, gusiga irangi ry'icyuma cyangwa aloyi bifite ingano nziza kandi idahinduka hamwe na filime z'ibyuma zifite uruhare rwa gaze bishobora gukorwa kugira ngo bihuze n'ibisabwa bitandukanye kandi by'ubuziranenge bya filime. Ibipimo bisanzwe byo gusiga irangi ry'amazi ni: umuvuduko w'akazi ni 01Pa; Voltage y'ingenzi ni 300 ~ 700V, kandi ubucucike bw'imbaraga z'ingenzi ni 1 ~ 36W / cm2. Ibiranga byihariye byo gusiga irangi ni:

(1) Igipimo cyo hejuru cyo gushyiramo. Bitewe n'ikoreshwa rya electrodes, imiyoboro minini cyane ya ion ishobora kuboneka, bityo igipimo cyo gusohora amata ku buso bw'ikintu n'igipimo cyo gushyiramo filime ku buso bw'ikintu kiri hejuru.

(2) Ingufu nyinshi. Amahirwe yo guhurirana hagati ya electron zikoresha ingufu nke na atome za gaze ni menshi, bityo igipimo cya ionization ya gaze kiriyongera cyane. Mu buryo nk'ubwo, impedance ya gaze isohoka (cyangwa plasma) iragabanuka cyane. Kubwibyo, ugereranije no gusohora amashanyarazi muri DC, nubwo umuvuduko w'akazi wagabanuka kuva kuri 1 ~ 10Pa ukagera kuri 10-2 ~ 10-1Pa, voltage yo gusohora amashanyarazi igabanuka kuva kuri volts ibihumbi byinshi ukagera kuri volts amagana, kandi imikorere yo gusohora amashanyarazi n'igipimo cyo kuyashyiramo amashanyarazi byiyongera ku rugero rw'ubunini.

(3) Gutemba gake gakoresha ingufu. Bitewe n'uko ingufu za cathode zikoreshwa ku ntego, plasma ihambirirwa mu mwanya wegereye cathode n'imbaraga za rukuruzi, ibyo bigatuma uduce dufite ingufu nyinshi tugera ku ruhande rw'ubutaka. Kubwibyo, urwego rw'ibyangiritse biterwa no gutemba gake gakoresha ingufu nyinshi ku duce nk'ibikoresho bya semiconductor ruri hasi ugereranyije n'ubundi buryo bwo gutemba.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua.