Uma kuqhathaniswa nobunye ubuchwepheshe bokumboza, i-sputtering coating inezici ezilandelayo ezibalulekile: imingcele yokusebenza inobubanzi obukhulu bokulungiswa okuguquguqukayo, isivinini sokubeka i-coating kanye nokuqina (isimo sendawo yokumboza) kulula ukuyilawula, futhi ayikho imingcele yokuklama ku-geometry yethagethi ye-sputtering ukuqinisekisa ukufana kwe-coating; Isendlalelo sefilimu asinayo inkinga yezinhlayiya ze-droplet: cishe zonke izinsimbi, ama-alloys nezinto ze-ceramic zingenziwa zibe izinto ezihlosiwe; Nge-DC noma i-RF sputtering, insimbi emsulwa noma ingxubevange enezilinganiso ezinembile nezingashintshi kanye namafilimu ensimbi ahambisana negesi angenziwa ukuze ahlangabezane nezidingo ezihlukahlukene nezinemba eliphezulu zamafilimu. Imingcele yenqubo evamile yokugcoba i-sputtering yilezi: ingcindezi yokusebenza ingu-01Pa; I-voltage eqondiwe ngu-300~700V, futhi ukuminyana kwamandla okuhlosiwe ngu-1~36W/cm2. Izimpawu eziqondile ze-sputtering yilezi:
(1) Izinga eliphezulu lokubeka imali. Ngenxa yokusetshenziswa kwama-electrode, ama-ion amakhulu kakhulu aqondiwe angatholakala, ngakho izinga lokufafaza endaweni okuqondiwe kanye nezinga lokubeka ifilimu endaweni engaphansi komhlaba liphezulu.
(2) Ukusebenza kahle kwamandla aphezulu. Amathuba okushayisana phakathi kwama-electron anamandla aphansi nama-athomu egesi aphezulu, ngakho izinga le-ionization yegesi lenyuka kakhulu. Ngokufanayo, i-impedance yegesi yokukhipha (noma i-plasma) iyancipha kakhulu. Ngakho-ke, uma kuqhathaniswa ne-DC-pole sputtering, ngisho noma ingcindezi yokusebenza incishisiwe isuka ku-1~10Pa iye ku-10-2~10-1Pa, i-voltage ye-sputtering iyancishiswa isuka ezinkulungwaneni zama-volts iye kumakhulu ama-volts, kanye nokusebenza kahle kokufafaza kanye nezinga lokubeka likhuphuka ngama-oda wobukhulu.
(3) Ukuphalaza okungenamandla aphansi. Ngenxa ye-voltage ephansi ye-cathode esetshenziswa kulokho okuhlosiwe, i-plasma iboshelwe esikhaleni esiseduze ne-cathode yi-magnetic field, evimbela ukwenzeka kwezinhlayiya ezikhokhiswa amandla aphezulu ohlangothini lwe-substrate. Ngakho-ke, izinga lomonakalo odalwe ukuqhunyiswa ngamabhomu kwezinhlayiya ezikhokhisiwe kuma-substrates afana nemishini ye-semiconductor liphansi kunalelo lezinye izindlela zokufafaza.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua.
Isikhathi sokuthumela: Sep-08-2023