Kuenzaniswa nemamwe matekinoroji ekuputira, sputtering coating ine zvinotevera akakosha maficha: iyo yekushanda parameter ine yakakura dynamic gadziriso renji, iyo coating deposition kumhanya uye ukobvu (iyo mamiriro enzvimbo yekupfekedza) zviri nyore kudzora, uye hapana dhizaini inorambidza pane geometry ye sputtering chinangwa kuti uve nechokwadi chekufanana kwejasi; Iyo firimu layer haina dambudziko remadonhwe particles: anenge ese masimbi, alloys uye ceramic zvinhu zvinogona kugadzirwa muchinangwa zvinhu; NeDC kana RF sputtering, simbi yakachena kana alloy coating ane chaiyo uye anogara akaenzana uye simbi inoita mafirimu ane gasi kutora chikamu anogona kugadzirwa kuti asangane neakasiyana uye akanyanya-chaiyo zvinodiwa zvemafirimu. Iyo yakajairwa maitiro maparamendi eku sputtering coating ndeaya: iyo yekushanda kumanikidza ndeye 01Pa; The target voltage is 300 ~ 700V, uye chinangwa chesimba density i1 ~ 36W/cm2. Mamiriro chaiwo ekusputtering ndeaya:
(1) High deposition rate. Nekuda kwekushandiswa kwemaelectrodhi, hombe kwazvo yakananga bombardment ion currents inogona kuwanikwa, saka sputtering etching rate pane yainongedzerwa uye firimu deposition rate pane substrate surface yakakwira.
(2) Kushanda nesimba kwepamusoro. Mukana wekudhumhana pakati pemaerekitironi akaderera-simba uye maatomu egasi wakakwira, saka mwero weionization yegasi unowedzera zvakanyanya. Saizvozvo, iyo impedance yekuburitsa gasi (kana plasma) yakaderedzwa zvakanyanya. Naizvozvo, kana zvichienzaniswa neDC mbiri-pole sputtering, kunyangwe kudzvanywa kwekushanda kwakaderedzwa kubva pa1 ~ 10Pa kuenda ku10-2 ~ 10-1Pa, sputtering voltage inoderedzwa kubva pazviuru zvakati volts kusvika kumazana emavolts, uye sputtering uye deposition rate inowedzera nemirairo yehukuru.
(3) Kupopota-pasi-simba. Pamusana pemvura yakadzika ye cathode inoshandiswa kune chinangwa, plasma inosungirirwa munzvimbo iri pedyo nekathodhi nemagnetic field, iyo inodzivisa chiitiko chepamusoro-simba rinopomerwa zvikamu kune rumwe rutivi rwe substrate. Naizvozvo, dhigirii rekukuvadza kunokonzerwa nekubhomba kwezvimedu zvinochajiswa kune substrates semiconductor zvishandiso zvakaderera pane zvedzimwe nzira dzekupfira.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua.
Nguva yekutumira: Sep-08-2023