Ibiranga magnetron sputtering coating ibice 1

Ugereranije nubundi buryo bwa tekinoroji yo gutwikisha, gusohora ibintu bifite ibintu byingenzi bikurikira: ibipimo byakazi bifite intera nini yo guhinduranya imbaraga, umuvuduko wo gushira hamwe nubunini (imiterere yakarere kegeranye) biroroshye kugenzura, kandi ntabubasha bwo gushushanya kuri geometrike yintego yo gusohora kugirango habeho uburinganire; Igice cya firime ntigifite ikibazo cyibice bitonyanga: ibyuma hafi ya byose, ibishishwa hamwe nibikoresho bya ceramic birashobora gukorwa mubikoresho bigenewe; Hamwe na DC cyangwa RF bisohora, ibyuma bisukuye cyangwa ibishishwa bifatanye neza kandi bihoraho hamwe na firime yerekana ibyuma byitabiriwe na gaze birashobora kubyara umusaruro kugirango bishoboke kandi bisobanutse neza bya firime. Uburyo busanzwe bwo gutondekanya ibintu ni: igitutu cyakazi ni 01Pa; Intego ya voltage ni 300 ~ 700V, naho ingufu zingana ni 1 ~ 36W / cm2. Ibintu byihariye biranga gusohora ni:

(1) Igipimo kinini cyo kubitsa. Bitewe no gukoresha electrode, intego nini cyane yibisasu bya bombe ya ion irashobora kuboneka, bityo igipimo cyo gutera akabariro hejuru yintego hamwe nigipimo cya firime hejuru yubutaka ni kinini.

(2) Gukoresha ingufu nyinshi. Amahirwe yo kugongana hagati ya electron zifite ingufu nkeya na atome ya gaze ni nyinshi, bityo igipimo cya ionisation ya gaze cyiyongereye cyane. Mu buryo nk'ubwo, inzitizi ya gaze isohoka (cyangwa plasma) iragabanuka cyane. Kubwibyo, ugereranije na DC gusohora inkingi ebyiri, nubwo umuvuduko wakazi wagabanutse uva kuri 1 ~ 10Pa ukagera kuri 10-2 ~ 10-1Pa, imbaraga za sputtering ziva kuri volt ibihumbi byinshi zikagera kuri volt amagana, kandi imikorere ya sputtering nigipimo cyiyongera byateganijwe nubunini.

(3) Imbaraga nkeya. Bitewe n’umuvuduko muke wa cathode ukoreshwa ku ntego, plasma ihambirwa mu mwanya uri hafi ya cathode n'umurima wa rukuruzi, ibyo bikaba bibuza kwanduza ingufu nyinshi zishyizwe ku ruhande rwa substrate. Kubwibyo, urugero rwibyangiritse byatewe nigisasu cyibice byashizwemo insimburangingo nkibikoresho bya semiconductor biri munsi yubundi buryo bwo gusohora.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua.