Mawonekedwe a magnetron sputtering zokutira mitu 1

Poyerekeza ndi umisiri wina ❖ kuyanika, ❖ kuyanika sputtering ali ndi zotsatirazi zofunika mbali: magawo ntchito ndi lalikulu zazikulu kusintha osiyanasiyana, ❖ kuyanika mafunsidwe liwiro ndi makulidwe (boma la ❖ kuyanika dera) n'zosavuta kulamulira, ndipo palibe zoletsa mapangidwe pa geometry wa chandamale sputtering kuonetsetsa yunifolomu ❖ kuyanika; Wosanjikiza filimu alibe vuto la droplet particles: pafupifupi zitsulo zonse, aloyi ndi ceramic zipangizo akhoza kupangidwa chandamale zipangizo; Ndi DC kapena RF sputtering, zokutira zitsulo zoyera kapena aloyi zokhala ndi mawonekedwe olondola komanso osasinthasintha komanso makanema amachitidwe azitsulo okhala ndi gasi amatha kupangidwa kuti akwaniritse zofunikira zosiyanasiyana komanso zolondola kwambiri zamakanema. The mmene ndondomeko magawo a sputtering ❖ kuyanika ndi: kuthamanga ntchito ndi 01Pa; Chandamale voteji ndi 300 ~ 700V, ndipo chandamale mphamvu kachulukidwe ndi 1 ~ 36W/cm2. Makhalidwe enieni a sputtering ndi:

(1) Mtengo wokwera kwambiri. Chifukwa chogwiritsa ntchito maelekitirodi, mafunde akulu kwambiri a bombardment atha kupezeka, kotero kuti sputtering etching pa chandamale ndi kuchuluka kwa filimu pa gawo lapansi ndipamwamba.

(2) Kugwiritsa ntchito mphamvu kwambiri. Kuthekera kwa kugundana pakati pa ma elekitironi otsika mphamvu ndi ma atomu a gasi ndikwambiri, motero kuchuluka kwa ionization ya mpweya kumawonjezeka kwambiri. Momwemonso, kulepheretsa kwa mpweya wotuluka (kapena plasma) kumachepetsedwa kwambiri. Choncho, poyerekeza ndi sputtering yamagetsi awiri a DC, ngakhale mphamvu yogwira ntchito ikucheperachepera kuchokera ku 1 ~ 10Pa mpaka 10-2 ~ 10-1Pa, mphamvu ya sputtering imachepetsedwa kuchokera ku ma volts zikwi zingapo kufika ku mazana a volts, ndi mphamvu ya sputtering ndi kuwonjezeka kwa mlingo wokhazikika ndi malamulo a kukula kwake.

(3) Kupopera mphamvu zochepa. Chifukwa cha otsika cathode voteji ntchito chandamale, plasma womangidwa mu danga pafupi ndi cathode ndi maginito, amene linalake ndipo tikulephera ndi zochitika za mkulu-mphamvu mlandu particles kumbali ya gawo lapansi. Chifukwa chake, kuchuluka kwa kuwonongeka komwe kumachitika chifukwa cha bombardment ya tinthu tating'onoting'ono tomwe timakhala ngati zida za semiconductor ndikotsika poyerekeza ndi njira zina zotayira.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua.