Idan aka kwatanta da sauran fasahar shafi, sputtering shafi yana da wadannan gagarumin fasali: da aiki sigogi da babban tsauri daidaita kewayon, da shafi ajiya gudun da kauri (jihar na shafi yankin) ne mai sauki don sarrafawa, kuma babu wani zane hani a kan lissafi na sputtering manufa don tabbatar da uniformity na shafi; Fim ɗin fim ɗin ba shi da matsala na ɗigon ɗigon ruwa: kusan dukkanin ƙarfe, gami da kayan yumbu za a iya sanya su cikin kayan manufa; Ta hanyar DC ko RF sputtering, ƙarfe mai tsafta ko kayan kwalliya tare da daidaitattun daidaito da daidaiton rabbai da fina-finai na amsawa na ƙarfe tare da sa hannun gas don saduwa da bambance-bambancen madaidaicin buƙatun fina-finai. Matsalolin tsari na yau da kullun na suturar sputtering sune: matsin aiki shine 01Pa; Maƙasudin ƙarfin lantarki shine 300 ~ 700V, kuma ƙimar ƙarfin manufa shine 1 ~ 36W/cm2. Musamman halayen sputtering sune:
(1) Yawan ajiya mai girma. Saboda amfani da na'urorin lantarki, ana iya samun manyan magudanar bama-bamai na ion igiyoyin ruwa, don haka yawan zubar da jini a saman da ake niyya da kuma adadin jigon fim a saman saman ƙasa yana da girma.
(2) Babban ƙarfin ƙarfi. Yiwuwar karo tsakanin ƙananan kuzarin lantarki da atom ɗin gas yana da girma, don haka adadin iskar gas yana ƙaruwa sosai. Hakazalika, ƙarancin iskar iskar gas (ko plasma) yana raguwa sosai. Saboda haka, idan aka kwatanta da DC biyu-pole sputtering, ko da aiki matsa lamba da aka rage daga 1 ~ 10Pa zuwa 10-2 ~ 10-1Pa, da sputtering ƙarfin lantarki da aka rage daga dama dubu volts zuwa daruruwan volts, da sputtering yadda ya dace da deposition kudi karuwa da umarni na girma.
(3)Rashin ƙarfi sputtering. Saboda ƙananan ƙarfin lantarki na cathode da aka yi amfani da shi a kan manufa, ana ɗaure plasma a cikin sararin samaniya kusa da cathode ta filin maganadisu, wanda ke hana abubuwan da ake cajin ƙwayoyin makamashi mai ƙarfi zuwa gefen substrate. Don haka, girman lalacewar da bama-bamai na ɓarke da aka caje ke haifarwa ga na'urori kamar na'urorin semiconductor ya yi ƙasa da na sauran hanyoyin sputtering.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua.
Lokacin aikawa: Satumba-08-2023