A. Izinga eliphezulu lokutshiza. Umzekelo, xa utshiza i-SiO2, isantya sokubeka singafikelela kwi-200nm/min, ngokuqhelekileyo ukuya kuthi ga kwi-10~100nm/min.
Kwaye izinga lokwenziwa kwefilimu lihambelana ngokuthe ngqo kumandla aphezulu.
B. Ukunamathela phakathi kwefilimu kunye ne-substrate inkulu kunokubekwa komphunga we-vacuum yomaleko wefilimu. Oku kubangelwa isiseko kumzimba wesiganeko iathom avareji kinetic amandla malunga 10eV, kwaye kwi-plasma substrate iya kulawulwa ngokungqongqo sputtering ukucocwa okubangela pinholes ngaphantsi kwi inwebu umaleko, ukucoceka eliphezulu, inwebu exineneyo umaleko.
C. Ukulungelelaniswa okubanzi kwezinto ze-membrane, nokuba yintsimbi okanye i-non-metal okanye i-compounds, phantse zonke izinto ezinokuthi zilungiswe kwi-plate ejikelezayo, ingasetyenziselwa ixesha elide.
D.Iimfuno zemilo yesubstrate ayifuni. Umphezulu ongalinganiyo we-substrate okanye ubukho bee-slits ezincinci kunye nobubanzi obungaphantsi kwe-1mm bunokutshizwa kwakhona kwifilimu.
Ukusetyenziswa kwerediyo yefrikhwensi ye-sputtering coating Ngokusekwe kwezi mpawu zingasentla, i-coat efakwe kwi-radio frequency sputtering isetyenziswa kakhulu ngoku, ngakumbi kulungiselelo lweesekethe ezidibeneyo kunye nefilimu yokusebenza kwe-dielectric isetyenziswa kakhulu. Ngokomzekelo, izinto ezingezizo i-conductor kunye ne-semiconductor ezifakwe kwi-RF sputtering, kubandakanywa izinto: i-semiconductor Si kunye ne-Ge, izinto ezixubileyo ze-GsAs, i-GaSb, i-GaN, i-InSb, i-InN, i-AIN, i-CaSe, i-Cds, i-PbTe, i-semiconductors ephezulu yobushushu be-SiC, i-ferroelectric compounds B14O2O2O2O20, izixhobo ze-ferroelectric B14O2O2T Al203, Y203, TiO2, ZiO2, SnO2, PtO, HfO2, Bi2O2, ZnO2, CdO, iglasi, iplastiki, njl.
Ukuba iithagethi ezininzi zifakwe kwigumbi lokugubungela, kunokwenzeka kwakhona ukugqiba ukulungiswa kwefilimu ye-multi-layer kwigumbi elinye ngaphandle kokutshabalalisa i-vacuum ngexesha elinye. Isixhobo sefrikhwensi yerediyo ye-electrode ezinikeleyo yokuthwala amakhonkco angaphakathi nangaphandle ukulungiselela ukutyabeka kwe-disulfide ngumzekelo wezixhobo ezisetyenziswa kumthombo wefrikhwensi kanomathotholo we-11.36MHz, umbane ojoliswe kuyo we-2 ~ 3kV, amandla ewonke e-12kW, uluhlu olusebenzayo lwamandla okufakelwa kwemagneti ye-0.008T, umda we-vacuum ye-6.5Pax1 izinga eliphezulu kunye neliphantsi lokubekwa. Ngaphaya koko, ukusebenza kakuhle kokusetyenziswa kwamandla okutshiza kweRF kuphantsi, kwaye isixa esikhulu samandla siguqulwa sibe bubushushu, obulahlekayo kumanzi okupholisa ekujoliswe kuwo.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Dec-21-2023