A. Yawan sputtering mai yawa. Misali, lokacin sputtering SiO2, yawan ajiya na iya kaiwa har zuwa 200nm/min, yawanci har zuwa 10~100nm/min.
Kuma yawan samar da fim yana daidai da ƙarfin mita mai yawa.
B. Mannewa tsakanin fim ɗin da substrate ya fi yawan ajiyar tururin iska na Layer ɗin fim ɗin. Wannan ya faru ne saboda matsakaicin kuzarin motsi na atom ɗin da ya faru na kimanin 10eV, kuma a cikin plasma substrate ɗin za a yi masa tsauraran tsaftacewa wanda zai haifar da ƙarancin ramuka a cikin Layer ɗin membrane, babban tsarki, da kuma Layer ɗin membrane mai yawa.
C. Ana iya daidaita kayan membrane sosai, ko dai ƙarfe ko wanda ba ƙarfe ba ko mahaɗan, kusan dukkan kayan ana iya shirya su a cikin faranti mai zagaye, ana iya amfani da su na dogon lokaci.
D. Bukatun siffar substrate ba su da wahala. Ana iya zuba saman substrate ɗin da bai daidaita ba ko kuma kasancewar ƙananan ramuka masu faɗin ƙasa da 1mm a cikin fim.
Amfani da murfin sputtering na mitar rediyo Dangane da halayen da ke sama, murfin da sputtering na mitar rediyo ke ajiyewa a halin yanzu ana amfani da shi sosai, musamman wajen shirya da'irori masu haɗawa da kuma fim ɗin aikin dielectric ana amfani da shi sosai. Misali, kayan da ba na conductor da semiconductor ba ne da aka ajiye ta hanyar sputtering na RF, waɗanda suka haɗa da abubuwa: semiconductor Si da Ge, kayan haɗin GsAs, GaSb, GaN, InSb, InN, AIN, CaSe, Cds, PbTe, semiconductors masu zafin jiki SiC, mahaɗan ferroelectric B14T3O12, kayan gasification In2Os, SiO2, Al203, Y203, TiO2, ZiO2, SnO2, PtO, HfO2, Bi2O2, ZnO2, CdO, gilashi, filastik, da sauransu.
Idan aka sanya maƙasudai da dama a cikin ɗakin rufewa, yana yiwuwa a kammala shirye-shiryen fim mai launuka da yawa a cikin ɗaki ɗaya ba tare da lalata injin ba a lokaci guda. Na'urar rediyo mai ƙera lantarki don ɗaukar zoben ciki da na waje don shirya murfin disulfide misali ne na kayan aikin da ake amfani da su a cikin mitar tushen mitar rediyo ta 11.36MHz, ƙarfin wutar lantarki na 2 ~ 3kV, jimlar ƙarfin 12kW, kewayon aiki na ƙarfin maganadisu na 0.008T, iyakar injin tsabtace ɗakin tsabtace shine 6.5X10-4Pa. Babban kuma ƙarancin ajiyar bayanai. Bugu da ƙari, ingancin amfani da wutar lantarki ta RF yana da ƙasa, kuma ana canza babban adadin wutar lantarki zuwa zafi, wanda ke ɓacewa daga ruwan sanyaya na abin da aka nufa.
– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua
Lokacin Saƙo: Disamba-21-2023