A. Te tere o te pupuhi. Hei tauira, i te wa e pupuhi ana te SiO2, ka taea e te tere whakatakotoranga te eke ki te 200nm/min, tae atu ki te 10~100nm/min.
Ā, he rite tonu te tere o te hanganga kiriata ki te mana auau teitei.
B. He nui ake te piri i waenga i te kiriata me te papa i te whakatakotoranga kohu korehau o te paparanga kiriata. Nā te mea ko te kaha nekeneke toharite o te ngota ira e tata ana ki te 10eV te take, ā, ka horoia rawatia te papa plasma, ka iti ake ngā kōhao iti i roto i te paparanga kiriuhi, he paparanga kiriuhi matotoru, he parakore teitei.
C. He whānui te urutau o te rauemi kiriuhi, ahakoa he mea whakarewa, he mea kore-whakarewa, he mea hanga rānei, ka taea te whakarite tata ki ngā rauemi katoa hei pereti porowhita, ka taea te whakamahi mō te wā roa.
Kāore i te uaua ngā whakaritenga mō te āhua o te papa. Ka taea hoki te pania ki roto i te kiriata te mata koretake o te papa, te noho rānei o ngā āputa iti nei te whānui i raro i te 1mm.
Te Whakamahinga o te Paninga Reo Irirangi. I runga i ngā āhuatanga o runga ake nei, ko te paninga i whakatakotoria e te reo irirangi he mea whānui ake te whakamahinga i tēnei wā, inā koa i roto i te whakarite i ngā ara iahiko whakauru me te kiriata mahi dielectric. Hei tauira, ko ngā rauemi kore-kaiārahi me ngā rauemi semiconductor i whakatakotoria e te RF sputtering, tae atu ki ngā huānga: semiconductor Si me Ge, ngā rauemi matū GsAs, GaSb, GaN, InSb, InN, AIN, CaSe, Cds, PbTe, ngā semiconductor pāmahana-teitei SiC, ngā matū ferroelectric B14T3O12, ngā rauemi mea hauhautanga In2Os, SiO2, Al203, Y203, TiO2, ZiO2, SnO2, PtO, HfO2, Bi2O2, ZnO2, CdO, karāhe, kirihou, me ētahi atu.
Mena he maha ngā ūnga e whakanohoia ana ki roto i te rūma paninga, ka taea hoki te whakaoti i te whakarite o te kiriata paparanga maha i roto i te rūma kotahi me te kore e whakangaro i te korehau i te wā kotahi. Ko te taputapu auau reo irirangi motuhake mō te kawe i ngā mowhiti o roto me waho mō te whakarite i te paninga disulfide he tauira o ngā taputapu e whakamahia ana i roto i te auau pūtake auau reo irirangi o 11.36MHz, te ngaohiko ūnga o 2 ~ 3kV, te mana katoa o 12kW, te whānuitanga mahi o te kaha aukume o 0.008T, ko te rohe o te korehau rūma korehau ko 6.5X10-4Pa. he tere teitei me te iti o te tere whakatakotoranga. Heoi anō, he iti te whai huatanga o te whakamahinga mana RF sputtering, ā, he nui te mana ka hurihia hei wera, ka ngaro mai i te wai whakamatao o te ūnga.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: Hakihea-21-2023