Ibiranga by'ingenzi byo gutwikira RF

A. Igipimo cyo gusukamo amazi kiri hejuru. Urugero, iyo usukamo SiO2, igipimo cyo gusukamo amazi gishobora kugera kuri 200nm/min, ubusanzwe kikagera kuri 10 ~ 100nm/min.

Kandi umuvuduko wo gukora filime ujyanye neza n'imbaraga zikoreshwa ku nshuro nyinshi.

B.Ubufatanye hagati ya filime n'igice cy'inyuma buruta ubwinshi bw'umwuka uva mu cyuma gipfundikiye. Ibi biterwa nuko ingufu z'ikinyabutabire ku mubiri w'ikintu cyabaye zigera kuri 10eV, kandi muri plasma substrate hazasukurwa cyane bigatuma utwobo duto two mu cyuma gipfundikiye tuba duke, ubuziranenge bwinshi, n'urwego rw'icyinyabutabire rurerure.

C. Kubera ko ibikoresho bya membrane bishobora guhinduka mu buryo burambuye, byaba icyuma cyangwa ibitari icyuma cyangwa ibintu bivanze, hafi ya byose bishobora gutegurwa mu isahani izengurutse, bishobora gukoreshwa igihe kirekire.

D. Ibisabwa kugira ngo imiterere y'urukuta igaragare ntabwo ari byinshi cyane. Ubuso butaringaniye bw'urukuta cyangwa kuba hari uturongo duto dufite ubugari buri munsi ya mm 1 nabyo bishobora guterwa mu firime.

Gukoresha irangi rikoresha radiyo frequency sputtering Hashingiwe ku miterere yavuzwe haruguru, irangi rikoreshwa na radiyo frequency sputtering rikoreshwa cyane muri iki gihe, cyane cyane mu gutegura imiyoboro ihuriweho kandi filimi ikoreshwa na dielectric ikoreshwa cyane. Urugero, ibikoresho bitari kondakteri na semiconductor bishyirwa na RF sputtering, harimo ibintu: semiconductor Si na Ge, ibikoresho bivanze GsAs, GaSb, GaN, InSb, InN, AIN, CaSe, Cds, PbTe, semiconductor zikoresha ubushyuhe bwinshi SiC, ferroelectric compounds B14T3O12, ibikoresho bya gasification In2Os, SiO2, Al203, Y203, TiO2, ZiO2, SnO2, PtO, HfO2, Bi2O2, ZnO2, CdO, ikirahure, pulasitiki, nibindi.

Iyo hashyizwe intego nyinshi mu cyumba cyo gusiga, birashoboka kandi kurangiza gutegura filime y’urwego rwinshi mu cyumba kimwe nta gusenya icyuho icyarimwe. Igikoresho cyagenewe electrode radio frequency cyo gushyiramo impeta z’imbere n’inyuma zo gutegura irangi rya disulfide ni urugero rw’ibikoresho bikoreshwa mu irangi rya radio frequency rya 11.36MHz, voltage ya 2 ~ 3kV, imbaraga zose za 12kW, imbaraga z’imikorere ya magnetic induction ya 0.008T, umupaka wa vacuum chamber vacuum ni 6.5X10-4Pa. igipimo cyo hejuru n’ikidahagije cyo gushyiramo. Byongeye kandi, ubushobozi bwo gukoresha ingufu za RF sputtering ni buke, kandi ingufu nyinshi zihinduka ubushyuhe, butakaza amazi akonje y’icyo kintu.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua