A. Heerka candhuufta sare. Tusaale ahaan, marka la dhufto SiO2, heerka dhigista wuxuu noqon karaa ilaa 200nm/min, badiyaa ilaa 10 ~ 100nm/daqiiqo.
Iyo heerka samaynta filimku wuxuu si toos ah u dhigmaa awoodda soo noqnoqda ee sarreeya.
B. Isku-xidhka u dhexeeya filimka iyo substrate-ka ayaa ka weyn kaydinta uumiga vacuum ee lakabka filimka. Tani waxay sabab u tahay saldhiga u ah jidhka dhacdada atamka celceliska tamarta kinetic ee ku saabsan 10eV, iyo in substrate plasma la hoos gelin doonaa nadiifinta sputtering adag taasoo keentay in pinholes yar lakabka xuubka, daahirsanaan sare, lakabka xuubka cufan.
C. La qabsiga ballaaran ee walxaha xuubka, ama birta ama kuwa aan birta ahayn ama xeryahooda, ku dhawaad dhammaan walxaha waxaa loo diyaarin karaa saxan wareegsan, waxaa loo isticmaali karaa waqti dheer.
D. Shuruudaha qaabka substrate-ku maaha mid dalbanaya. Dusha aan sinnayn ee substrate-ka ama jiritaanka jeexjeexyo yaryar oo ballac ah oo ka yar 1mm ayaa sidoo kale lagu daadin karaa filim.
Codsiga dahaarka xajinta soo noqnoqda raadiyaha Iyadoo lagu saleynayo sifooyinka kor ku xusan, dahaarka lagu kaydiyo xajinta inta jeer ee raadiyaha ayaa hadda si ballaaran loo isticmaalaa, gaar ahaan diyaarinta wareegyada isku dhafan iyo filimka shaqada dielectric ayaa si gaar ah loo isticmaalaa. Tusaale ahaan, qalabka aan konductor-ka ahayn iyo semiconductor ee lagu kaydiyo RF sputtering, oo ay ku jiraan walxaha: semiconductor Si iyo Ge, walxaha isku dhafan GsAs, GaSb, GaN, InSb, InN, AIN, CaSe, Cds, PbTe, heerkul sare semiconductors SiC, ferroelectric xeryahooda B14T3O12, Gass 2, gass B14T3O12. Y203, TiO2, ZiO2, SnO2, PtO, HfO2, Bi2O2, ZnO2, CdO, galaas, caag, iwm.
Haddii dhowr bartilmaameed la dhigo qolka dahaarka, waxa kale oo suurtogal ah in la dhamaystiro diyaarinta filimo badan oo lakab ah oo isku mid ah iyada oo aan la burburin vacuum hal mar. Qalabka soo noqnoqda ee raadiyaha ee loo qoondeeyey ee siddooyinka gudaha iyo dibaddaba loogu talagalay diyaarinta daahan disulfide waa tusaale ka mid ah qalabka loo isticmaalo inta jeer ee isha soo noqnoqda raadiyaha ee 11.36MHz, danab bartilmaameedka 2 ~ 3kV, wadarta awoodda 12kW, kala duwanaanshaha shaqada ee xoogga induction magnetic ee 0.008T, xadka vacuum 6.5 vacuum chamber. heerka dhigaalka sare iyo hoose. Waxaa intaa dheer, waxtarka ka faa'iidaysiga korantada ee RF waa mid hooseeya, iyo qadar badan oo awood ah ayaa loo beddelaa kulayl, kaas oo ka lumay biyaha qaboojinta ee bartilmaameedka.
–Maqaalkan waxa soo saaraysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua
Waqtiga boostada: Dec-21-2023