RF Sputtering Coating Ibiranga Ibyingenzi

A. Igipimo kinini. Kurugero, mugihe usohora SiO2, igipimo cyo kubitsa gishobora kugera kuri 200nm / min, mubisanzwe bigera kuri 10 ~ 100nm / min.

Kandi igipimo cyo gukora firime kiragereranijwe neza nimbaraga nyinshi.

B.Gufatanya hagati ya firime na substrate birarenze gusohora imyuka ya vacuum ya layer ya firime. Ibi biterwa nifatizo kumubiri wibyabaye atom impuzandengo ya kinetic yingufu zingana na 10eV, kandi muri plasma substrate izakorerwa isuku rikabije bivamo pinhole nkeya murwego rwa membrane, ubuziranenge bwinshi, urwego rwinshi.

C. Ihinduka ryinshi ryibikoresho bya membrane, haba ibyuma cyangwa bitari ibyuma cyangwa ibice, ibikoresho hafi ya byose birashobora gutegurwa mubisahani bizengurutse, birashobora gukoreshwa igihe kirekire.

D.Ibisabwa kumiterere ya substrate ntabwo bisaba. Ubuso butaringaniye bwa substrate cyangwa kuba hari uduce duto dufite ubugari buri munsi ya 1mm nabyo birashobora gusukwa muri firime.

Ikoreshwa rya radiyo yumurongo wa radiyo Ukurikije ibimenyetso byavuzwe haruguru, igifuniko cyashyizwe kumurongo wa radiyo yumurongo kuri ubu kirakoreshwa cyane, cyane cyane mugutegura imiyoboro ihuriweho hamwe na firime ya dielectric ikoreshwa cyane. Kurugero, ibikoresho bitayobora hamwe na semiconductor ibikoresho byashyizwe ahagaragara na RF sputtering, harimo ibintu: semiconductor Si na Ge, ibikoresho bivanga GsAs, GaSb, GaN, InSb, InN, AIN, CaSe, Cds, PbTe, ubushyuhe bwo hejuru bwa semiconductor SiC, ferroelectric compound B20T3O12, gazi TiO2, ZiO2, SnO2, PtO, HfO2, Bi2O2, ZnO2, CdO, ikirahure, plastike, nibindi.

Niba intego nyinshi zashyizwe mubyumba bitwikiriye, birashoboka kandi kurangiza gutegura firime ya etage nyinshi mucyumba kimwe utarimbuye icyuho icyarimwe. Ibikoresho byabigenewe bya radiyo ya elegitoronike yo kwifashisha impeta y'imbere n'inyuma yo gutegura impuzu ya disulfide ni urugero rw'ibikoresho bikoreshwa mu maradiyo ya radiyo yumurongo wa 11.36MHz, imbaraga za voltage ya 2 ~ 3kV, imbaraga zose za 12kW, urwego rukora rw'ingufu za rukuruzi ya 0.008T, imipaka ya vacuum vacuum ni 6.5X10-4Pa. igipimo cyo hejuru kandi gito. Byongeye kandi, gukoresha ingufu za RF ikoresha neza ni bike, kandi imbaraga nyinshi zihinduka ubushyuhe, butakara mumazi akonje yintego.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua