A. Kuthamanga kwambiri. Mwachitsanzo, mukamamwaza SiO2, kuchuluka kwake kumatha kufika 200nm/min, nthawi zambiri mpaka 10~100nm/min.
Ndipo mlingo wa mapangidwe filimu mwachindunji mogwirizana ndi mkulu pafupipafupi mphamvu.
B. Kumatira pakati pa filimuyo ndi gawo lapansi ndikokulirapo kuposa kuyika kwa nthunzi ya vacuum ya filimuyo. Izi ndichifukwa cha m'munsi ku thupi la chochitika atomu pafupifupi kinetic mphamvu za 10eV, ndi mu plasma gawo lapansi adzakhala pansi okhwima sputtering kuyeretsa chifukwa chochepa pinholes mu nembanemba wosanjikiza, mkulu chiyero, wandiweyani nembanemba wosanjikiza.
C. Kusinthasintha kwakukulu kwa zinthu za nembanemba, kaya zitsulo kapena zopanda zitsulo kapena zosakaniza, pafupifupi zipangizo zonse zimatha kukonzedwa kukhala mbale yozungulira, zingagwiritsidwe ntchito kwa nthawi yaitali.
D. Zofunikira pa mawonekedwe a gawo lapansi sizofunikira. Pamwamba pa gawo lapansi kapena kukhalapo kwazing'ono zokhala ndi m'lifupi mwake zosakwana 1mm kungathenso kuponyedwa mufilimu.
Kugwiritsa ntchito zokutira kwa ma radio frequency sputtering Kutengera ndi zomwe tafotokozazi, zokutira zomwe zimayikidwa ndi ma radio frequency sputtering pano zimagwiritsidwa ntchito kwambiri, makamaka pokonzekera mabwalo ophatikizika komanso filimu ya dielectric ntchito imagwiritsidwa ntchito kwambiri. Mwachitsanzo, zinthu zopanda conductor ndi semiconductor zomwe zimayikidwa ndi RF sputtering, kuphatikiza zinthu: semiconductor Si ndi Ge, zida zapawiri GsAs, GaSb, GaN, InSb, InN, AIN, CaSe, Cds, PbTe, ma semiconductors apamwamba kwambiri SiC, ferroelectric mankhwala B12O2O3O zinthu B12O2Os3O Al203, Y203, TiO2, ZiO2, SnO2, PtO, HfO2, Bi2O2, ZnO2, CdO, galasi, pulasitiki, ndi zina zotero.
Ngati zolinga zingapo zayikidwa mu chipinda chophikira, ndizothekanso kumaliza kukonzekera filimu yamitundu yambiri mu chipinda chimodzi popanda kuwononga vacuum nthawi imodzi. Odzipereka elekitirodi wailesi pafupipafupi chipangizo kubala mphete mkati ndi kunja kwa yokonza disulfide ❖ kuyanika ndi chitsanzo cha zipangizo ntchito wailesi pafupipafupi gwero gwero pafupipafupi 11.36MHz, chandamale voteji 2 ~ 3kV, mphamvu okwana 12kW, ntchito osiyanasiyana maginito kupatsidwa ulemu mphamvu ya 0.008T, malire a vacuum 6.4 Pax 1 ndi vacuum 6.4 Pa X1. mkulu ndi otsika mlingo deposition. Kuphatikiza apo, mphamvu yogwiritsira ntchito mphamvu ya RF sputtering ndiyotsika, ndipo mphamvu zambiri zimasinthidwa kukhala kutentha, komwe kumatayika kuchokera m'madzi ozizira omwe mukufuna.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: Dec-21-2023