A. Oke sputtering ọnụego. Ọmụmaatụ, mgbe sputtering SiO2, nkwụnye ego ọnụego nwere ike ruo 200nm/min, na-emekarị ruo 10 ~ 100nm/min.
Na ọnụego nke mmepụta ihe nkiri na-adabere kpọmkwem na ike ugboro ugboro.
B.Adhesion n'etiti ihe nkiri na mkpụrụ dị ukwuu karịa oghere vapor deposition nke ihe nkiri oyi akwa. Nke a bụ n'ihi na isi ka ozu nke merenụ atom nkezi kinetic ike nke banyere 10eV, na na plasma mkpụrụ ga-edobere siri sputtering ihicha n'ihi na-erughị pinholes na akpụkpọ ahụ oyi akwa, elu ịdị ọcha, ok akpụkpọ oyi akwa.
C.Wide adaptability nke akpụkpọ ahụ, ma ọ bụ ígwè ma ọ bụ na-abụghị metal ma ọ bụ ogige, ihe fọrọ nke nta ka ọ bụrụ ihe niile nwere ike ịkwadebe n'ime efere gburugburu, enwere ike iji ya ogologo oge.
D. Ihe achọrọ maka ọdịdị nke mkpụrụ anaghị achọ. E nwekwara ike fesa elu elu nke mkpụrụ osisi ma ọ bụ ịdị adị nke obere slits nwere obosara na-erughị 1mm n'ime ihe nkiri.
Ngwa nke mkpuchi ịgbasa redio ugboro ugboro Dabere na njirimara ndị a dị n'elu, a na-eji mkpuchi nke etinyere site na ịgbasa redio ugboro ugboro ugbu a, karịsịa na nkwadebe nke sekit jikọtara ọnụ na ihe nkiri ọrụ dielectric na-ejikarị eme ihe. Dịka ọmụmaatụ, ihe ndị na-abụghị ndị nduzi na semiconductor na-edebe site na RF sputtering, gụnyere ihe ndị dị: semiconductor Si na Ge, GsAs, GaSb, GaN, InSb, InN, AIN, CaSe, Cds, PbTe, semiconductors okpomọkụ dị elu SiC, ferroelectric compounds B14T3O12, gass B14T3O12. Y203, TiO2, ZiO2, SnO2, PtO, HfO2, Bi2O2, ZnO2, CdO, iko, plastic, wdg.
Ọ bụrụ na etinyere ọtụtụ ebumnuche n'ime ụlọ mkpuchi, ọ ga-ekwe omume mezue nkwadebe nke ihe nkiri multi-layer n'otu ọnụ ụlọ ahụ n'emebighị oghere n'otu oge. Ngwaọrụ redio raara onwe ya nye maka iburu mgbanaka n'ime na mpụta maka nkwadebe nke mkpuchi disulfide bụ ihe atụ nke akụrụngwa ejiri na redio ugboro ugboro nke 11.36MHz, voltaji lekwasịrị anya nke 2 ~ 3kV, ike zuru oke nke 12kW, oke ọrụ nke ike induction magnetik nke 0.008T, njedebe nke oghere-6.5. elu na obere nkwụnye ego. Ọzọkwa, RF sputtering ike itinye n'ọrụ dị ala, na nnukwu ego na-agbanwe na okpomọkụ, nke na-efunahụ site na mmiri jụrụ oyi nke ebumnuche.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Dec-21-2023