A. High sputtering tus nqi. Piv txwv li, thaum sputtering SiO2, tus nqi tso nyiaj tuaj yeem nce mus txog 200nm / min, feem ntau mus txog 10 ~ 100nm / min.
Thiab tus nqi ntawm cov zaj duab xis tsim yog ncaj qha proportional rau lub siab zaus zog.
B.Qhov adhesion ntawm zaj duab xis thiab cov substrate yog ntau tshaj qhov nqus vapor deposition ntawm zaj duab xis txheej. Qhov no yog vim lub hauv paus rau lub cev ntawm qhov teeb meem atom nruab nrab kinetic zog ntawm txog 10eV, thiab nyob rau hauv lub plasma substrate yuav raug nruj sputtering tu uas ua rau tsawg pinholes nyob rau hauv lub membrane txheej, siab purity, ntom membrane txheej.
C.Wide adaptability ntawm cov ntaub ntawv membrane, xws li hlau los yog tsis-hlau los yog cov tebchaw, yuav luag tag nrho cov ntaub ntawv yuav tsum tau npaj rau hauv ib tug puag ncig phaj, yuav siv tau rau lub sij hawm ntev.
D. Cov kev cai rau cov duab ntawm lub substrate tsis xav tau. Qhov tsis sib xws ntawm lub substrate los yog qhov muaj nyob ntawm me me slits nrog ib tug dav ntawm tsawg tshaj li 1 hli kuj yuav sputtered rau hauv ib zaj duab xis.
Daim ntawv thov ntawm xov tooj cua zaus sputtering txheej Raws li cov yam ntxwv saum toj no, cov txheej txheem ntawm cov xov tooj cua zaus sputtering yog tam sim no siv ntau dua, tshwj xeeb tshaj yog nyob rau hauv kev npaj ntawm kev sib xyaw circuits thiab dielectric muaj nuj nqi zaj duab xis yog tshwj xeeb tshaj yog dav siv. Piv txwv li, cov ntaub ntawv uas tsis yog-conductor thiab semiconductor tso los ntawm RF sputtering, suav nrog cov khoom: semiconductor Si thiab Ge, cov ntaub ntawv sib xyaw GsAs, GaSb, GaN, InSb, InN, AIN, CaSe, Cds, PbTe, high-temperature semiconductors SiC, ferroelectric compounds B14T3O12, gas, Y203, TiO2, ZiO2, SnO2, PtO, HfO2, Bi2O2, ZnO2, CdO, iav, yas, thiab lwm yam.
Yog tias ob peb lub hom phiaj tau muab tso rau hauv cov txheej txheem txheej txheej, nws tseem tuaj yeem ua kom tiav qhov kev npaj ntawm ntau txheej txheej hauv tib lub chamber yam tsis tau rhuav tshem lub tshuab nqus tsev ib zaug. Dedicated electrode xov tooj cua zaus ntaus ntawv rau bearing puab thiab sab rings rau kev npaj ntawm disulfide txheej yog ib qho piv txwv ntawm cov khoom siv nyob rau hauv lub xov tooj cua zaus qhov zaus ntawm 11.36MHz, lub hom phiaj voltage ntawm 2 ~ 3kV, tag nrho cov hwj chim ntawm 12kW, kev ua hauj lwm ntau yam ntawm magnetic induction zog ntawm 0.000000000 6.5 X 10-4 Pa. siab thiab qis deposition tus nqi. Ntxiv mus, RF sputtering zog siv efficiency yog tsawg, thiab ib tug loj npaum li cas ntawm lub hwj chim hloov mus rau hauv tshav kub, uas yog ploj los ntawm cov dej txias ntawm lub hom phiaj.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Dec-21-2023