Kuyini ukumbozwa komthombo wokuhwamuka kokumelana?

Ukwembozwa komthombo wokuhwamuka kokumelana kuyindlela eyisisekelo yokumbozwa kokuhwamuka kwe-vacuum. Igama elithi “Ukuhwamuka” libhekisela endleleni yokulungiselela ifilimu encane lapho izinto zokumboza egumbini lokuhwamuka zishiswa futhi zihwamuke, ukuze ama-athomu noma ama-molecule ezinto ahwamuke futhi aphume ebusweni, akhe into yokugeleza komusi, isigameko ebusweni be-substrate noma i-substrate, futhi ekugcineni afinyelene ukuze akhe ifilimu eqinile.

Indlela ebizwa ngokuthi i-resistance evaporation source coating iwukusebenzisa i-tantalum, i-molybdenum, i-tungsten nezinye izinsimbi ezisezingeni eliphezulu lokuncibilika ukuze kwenziwe isimo esifanele somthombo wokuhwamuka, ogcwele izinto ezizohwamuka, uvumele umoya udlule, ufudumale futhi uhwamule ngqo izinto ezihwamukayo, noma ufake izinto ezizohwamuka zibe yi-alumina, i-beryllium oxide nezinye izinto ezisetshenziswayo ukuze kufudumale futhi kuhwamule ngokungaqondile. Lena indlela yokuhwamuka kokushisa kokumelana.

Iumshini wokumboza nge-vacuum vaporUkushiswa nokuhwamuka yi-resistance heater kunezinzuzo zesakhiwo esilula, izindleko eziphansi kanye nokusetshenziswa okuthembekile. Ingasetshenziswa ekumbozeni izinto ezinamazinga aphansi okuncibilika, ikakhulukazi ekukhiqizweni okukhulu okunezidingo eziphansi zekhwalithi yokumboza. Kuze kube manje, kusenenqwaba yezinqubo zokumboza zokushisa nokuhwamuka kokumelana ezisetshenziswa ekukhiqizweni kwezibuko ezine-aluminium.

Ububi bendlela yokugqoka umhwamuko womthombo wokuhwamuka kokumelana ukuthi izinga lokushisa eliphezulu elingafinyelelwa ngokushisa lilinganiselwe, futhi impilo yesevisi yesifudumezi nayo imfushane. Eminyakeni yamuva nje, ukuze kuthuthukiswe impilo yomthombo wokuhwamuka kokumelana, ifektri yemishini isebenzise izinto ze-ceramic eziqhutshwayo ezakhiwe yi-boron nitride ezinokuphila isikhathi eside njengomthombo wokuhwamuka. Ngokusho kombiko welungelo lobunikazi laseJapan, ingasebenzisa izinto ezakhiwe yi-boron nitride engu-20% ~ 30% nezinto eziphikisayo ezingahlanganiswa nayo ukwenza umthombo wokuhwamuka (ongacwiliswa), futhi zimboze ubuso bayo ngesendlalelo se-zirconium esiqukethe u-62% ~ 82%, kanti ezinye izinto ziyi-zirconium-silicon alloy.