Kuphimba kwa gwero la kukana kusungunuka kwa mpweya ndi njira yoyambira yophimba kusungunuka kwa mpweya wa vacuum. "Kusungunuka kwa mpweya" kumatanthauza njira yokonzekera filimu yopyapyala momwe zinthu zophimba zomwe zili mu chipinda chosungunuka zimatenthedwa ndikusungunuka, kotero kuti maatomu kapena mamolekyu azinthuzo amatuluka ndi kutuluka pamwamba, ndikupanga chinthu choyenda ndi nthunzi, chomwe chimagwera pamwamba pa substrate kapena substrate, ndipo pamapeto pake chimapindika kuti chipange filimu yolimba.
Njira yotchedwa resistance evaporation source coating ndi kugwiritsa ntchito tantalum, molybdenum, tungsten ndi zitsulo zina zomwe zimasungunuka kwambiri kuti apange mawonekedwe oyenera a evaporation source, omwe amadzazidwa ndi zinthu zomwe ziyenera kusunthidwa, kulola mpweya kudutsa, kutentha mwachindunji ndi kusandutsa zinthu zomwe zasunthidwa, kapena kuyika zinthu zomwe ziyenera kusunthidwa kukhala alumina, beryllium oxide ndi zinthu zina zophikira kuti zitenthetse ndi kusuntha mosalunjika. Iyi ndi njira yotetezera evaporation ya kutentha.
Themakina ophikira opangidwa ndi vacuum evaporationChotenthetsera cholimba komanso chotenthetsera cholimba chili ndi ubwino wa kapangidwe kosavuta, mtengo wotsika komanso kugwiritsa ntchito kodalirika. Chingagwiritsidwe ntchito popaka utoto wa zinthu zomwe zimakhala ndi malo otsika osungunuka, makamaka popanga zinthu zambiri zomwe sizikufunika kuti utoto ukhale wabwino. Pakadali pano, pali njira zambiri zopaka utoto zomwe zimagwiritsidwa ntchito popanga magalasi okhala ndi aluminiyamu.
Zoyipa za njira yophikira evaporation source evaporation ndikuti kutentha kwakukulu komwe kungafikidwe ndi kutentha kumakhala kochepa, ndipo nthawi yogwiritsira ntchito ya chotenthetsera nayonso ndi yochepa. M'zaka zaposachedwa, kuti akonze moyo wa evaporation source yolimbana, fakitale ya zida yagwiritsa ntchito zinthu zadothi zopangidwa ndi boron nitride zomwe zimapangidwa ndi boron nitride zomwe zimakhala ndi moyo wautali ngati gwero la evaporation. Malinga ndi lipoti la patent la ku Japan, ingagwiritse ntchito zipangizo zopangidwa ndi boron nitride 20% ~ 30% ndi zinthu zotsutsana zomwe zingaphatikizidwe nazo kuti zipange evaporation source (yophikidwa), ndikuphimba pamwamba pake ndi wosanjikiza wa zirconium wokhala ndi 62% ~ 82%, ndipo zina zonse ndi zirconium-silicon alloy.
Nthawi yotumizira: Epulo-22-2023

